5/9/2010	9:01:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	9:01:30 AM	Recipe started at 9:01 AM
5/9/2010	9:01:30 AM	H2 valve closed
5/9/2010	9:01:30 AM	BCl3 valve closed
5/9/2010	9:01:30 AM	PH3 valve closed
5/9/2010	9:01:30 AM	SiCl4 pre valve closed
5/9/2010	9:01:30 AM	SiCl4 post valve closed
5/9/2010	9:01:30 AM	Main Vac valve closed
5/9/2010	9:01:30 AM	Bypass valve closed
5/9/2010	9:01:30 AM	Bubbler valve closed
5/9/2010	9:01:30 AM	Helium valve opened
5/9/2010	9:01:30 AM	Helium MFC set to  500.000000
5/9/2010	9:01:30 AM	H2 MFC set to  0.000000
5/9/2010	9:01:30 AM	BCl3 MFC set to  0.000000
5/9/2010	9:01:30 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:01:30 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:01:30 AM	Tube furnace set to 0
5/9/2010	9:02:47 AM	Helium valve closed
5/9/2010	9:02:47 AM	H2 valve closed
5/9/2010	9:02:47 AM	BCl3 valve closed
5/9/2010	9:02:47 AM	PH3 valve closed
5/9/2010	9:02:47 AM	SiCl4 pre valve closed
5/9/2010	9:02:47 AM	SiCl4 post valve closed
5/9/2010	9:02:47 AM	Main Vac valve closed
5/9/2010	9:02:47 AM	Bypass valve closed
5/9/2010	9:02:47 AM	Bubbler valve closed
5/9/2010	9:02:47 AM	Helium MFC set to  0.000000
5/9/2010	9:02:47 AM	H2 MFC set to  0.000000
5/9/2010	9:02:47 AM	BCl3 MFC set to  0.000000
5/9/2010	9:02:47 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:02:47 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:02:47 AM	Tube furnace set to 0
5/9/2010	9:02:48 AM	Run finished at 9:02 AM
5/9/2010	9:02:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	9:16:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	9:16:19 AM	Recipe started at 9:16 AM
5/9/2010	9:16:19 AM	Helium valve closed
5/9/2010	9:16:19 AM	H2 valve closed
5/9/2010	9:16:19 AM	BCl3 valve closed
5/9/2010	9:16:19 AM	PH3 valve closed
5/9/2010	9:16:19 AM	SiCl4 pre valve closed
5/9/2010	9:16:19 AM	SiCl4 post valve closed
5/9/2010	9:16:19 AM	Main Vac valve closed
5/9/2010	9:16:19 AM	Bubbler valve closed
5/9/2010	9:16:19 AM	Bypass valve opened
5/9/2010	9:16:19 AM	Helium MFC set to  0.000000
5/9/2010	9:16:19 AM	H2 MFC set to  0.000000
5/9/2010	9:16:19 AM	BCl3 MFC set to  0.000000
5/9/2010	9:16:19 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:16:19 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:16:19 AM	Tube furnace set to 0
5/9/2010	9:17:02 AM	Helium valve closed
5/9/2010	9:17:02 AM	H2 valve closed
5/9/2010	9:17:02 AM	BCl3 valve closed
5/9/2010	9:17:02 AM	PH3 valve closed
5/9/2010	9:17:02 AM	SiCl4 pre valve closed
5/9/2010	9:17:02 AM	SiCl4 post valve closed
5/9/2010	9:17:02 AM	Bubbler valve closed
5/9/2010	9:17:02 AM	Main Vac valve opened
5/9/2010	9:17:02 AM	Bypass valve opened
5/9/2010	9:17:02 AM	Helium MFC set to  0.000000
5/9/2010	9:17:02 AM	H2 MFC set to  0.000000
5/9/2010	9:17:02 AM	BCl3 MFC set to  0.000000
5/9/2010	9:17:02 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:17:02 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:17:02 AM	Tube furnace set to 0
5/9/2010	9:17:03 AM	Run finished at 9:17 AM
5/9/2010	9:17:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	9:17:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/9/2010	9:17:51 AM	Recipe started at 9:17 AM
5/9/2010	9:17:51 AM	H2 valve closed
5/9/2010	9:17:51 AM	BCl3 valve closed
5/9/2010	9:17:51 AM	PH3 valve closed
5/9/2010	9:17:51 AM	SiCl4 pre valve closed
5/9/2010	9:17:51 AM	SiCl4 post valve closed
5/9/2010	9:17:51 AM	Main Vac valve closed
5/9/2010	9:17:51 AM	Bypass valve closed
5/9/2010	9:17:51 AM	Bubbler valve closed
5/9/2010	9:17:51 AM	Helium valve opened
5/9/2010	9:17:51 AM	Helium MFC set to  500.000000
5/9/2010	9:17:51 AM	H2 MFC set to  0.000000
5/9/2010	9:17:51 AM	BCl3 MFC set to  0.000000
5/9/2010	9:17:51 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:17:51 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:17:51 AM	Tube furnace set to 0
5/9/2010	9:19:12 AM	Helium valve closed
5/9/2010	9:19:12 AM	H2 valve closed
5/9/2010	9:19:12 AM	BCl3 valve closed
5/9/2010	9:19:12 AM	PH3 valve closed
5/9/2010	9:19:12 AM	SiCl4 pre valve closed
5/9/2010	9:19:12 AM	SiCl4 post valve closed
5/9/2010	9:19:12 AM	Main Vac valve closed
5/9/2010	9:19:12 AM	Bypass valve closed
5/9/2010	9:19:12 AM	Bubbler valve closed
5/9/2010	9:19:12 AM	Helium MFC set to  0.000000
5/9/2010	9:19:12 AM	H2 MFC set to  0.000000
5/9/2010	9:19:12 AM	BCl3 MFC set to  0.000000
5/9/2010	9:19:12 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:19:12 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:19:12 AM	Tube furnace set to 0
5/9/2010	9:19:27 AM	Helium valve closed
5/9/2010	9:19:27 AM	H2 valve closed
5/9/2010	9:19:27 AM	BCl3 valve closed
5/9/2010	9:19:27 AM	PH3 valve closed
5/9/2010	9:19:27 AM	SiCl4 pre valve closed
5/9/2010	9:19:27 AM	SiCl4 post valve closed
5/9/2010	9:19:27 AM	Main Vac valve closed
5/9/2010	9:19:27 AM	Bubbler valve closed
5/9/2010	9:19:27 AM	Bypass valve opened
5/9/2010	9:19:27 AM	Helium MFC set to  0.000000
5/9/2010	9:19:27 AM	H2 MFC set to  0.000000
5/9/2010	9:19:27 AM	BCl3 MFC set to  0.000000
5/9/2010	9:19:27 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:19:27 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:19:27 AM	Tube furnace set to 0
5/9/2010	9:19:58 AM	Helium valve closed
5/9/2010	9:19:58 AM	H2 valve closed
5/9/2010	9:19:58 AM	BCl3 valve closed
5/9/2010	9:19:58 AM	PH3 valve closed
5/9/2010	9:19:58 AM	SiCl4 pre valve closed
5/9/2010	9:19:58 AM	SiCl4 post valve closed
5/9/2010	9:19:58 AM	Bubbler valve closed
5/9/2010	9:19:58 AM	Main Vac valve opened
5/9/2010	9:19:58 AM	Bypass valve opened
5/9/2010	9:19:58 AM	Helium MFC set to  0.000000
5/9/2010	9:19:58 AM	H2 MFC set to  0.000000
5/9/2010	9:19:58 AM	BCl3 MFC set to  0.000000
5/9/2010	9:19:58 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:19:58 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:19:58 AM	Tube furnace set to 0
5/9/2010	9:24:58 AM	H2 valve closed
5/9/2010	9:24:58 AM	BCl3 valve closed
5/9/2010	9:24:58 AM	PH3 valve closed
5/9/2010	9:24:58 AM	SiCl4 pre valve closed
5/9/2010	9:24:58 AM	SiCl4 post valve closed
5/9/2010	9:24:58 AM	Main Vac valve closed
5/9/2010	9:24:58 AM	Bypass valve closed
5/9/2010	9:24:58 AM	Bubbler valve closed
5/9/2010	9:24:58 AM	Helium valve opened
5/9/2010	9:24:58 AM	Helium MFC set to  500.000000
5/9/2010	9:24:58 AM	H2 MFC set to  0.000000
5/9/2010	9:24:58 AM	BCl3 MFC set to  0.000000
5/9/2010	9:24:58 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:24:58 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:24:58 AM	Tube furnace set to 0
5/9/2010	9:26:19 AM	Helium valve closed
5/9/2010	9:26:19 AM	H2 valve closed
5/9/2010	9:26:19 AM	BCl3 valve closed
5/9/2010	9:26:19 AM	PH3 valve closed
5/9/2010	9:26:19 AM	SiCl4 pre valve closed
5/9/2010	9:26:19 AM	SiCl4 post valve closed
5/9/2010	9:26:19 AM	Main Vac valve closed
5/9/2010	9:26:19 AM	Bypass valve closed
5/9/2010	9:26:19 AM	Bubbler valve closed
5/9/2010	9:26:19 AM	Helium MFC set to  0.000000
5/9/2010	9:26:19 AM	H2 MFC set to  0.000000
5/9/2010	9:26:19 AM	BCl3 MFC set to  0.000000
5/9/2010	9:26:19 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:26:19 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:26:19 AM	Tube furnace set to 0
5/9/2010	9:26:34 AM	Helium valve closed
5/9/2010	9:26:34 AM	H2 valve closed
5/9/2010	9:26:34 AM	BCl3 valve closed
5/9/2010	9:26:34 AM	PH3 valve closed
5/9/2010	9:26:34 AM	SiCl4 pre valve closed
5/9/2010	9:26:34 AM	SiCl4 post valve closed
5/9/2010	9:26:34 AM	Main Vac valve closed
5/9/2010	9:26:34 AM	Bubbler valve closed
5/9/2010	9:26:34 AM	Bypass valve opened
5/9/2010	9:26:34 AM	Helium MFC set to  0.000000
5/9/2010	9:26:34 AM	H2 MFC set to  0.000000
5/9/2010	9:26:34 AM	BCl3 MFC set to  0.000000
5/9/2010	9:26:34 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:26:34 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:26:34 AM	Tube furnace set to 0
5/9/2010	9:27:05 AM	Helium valve closed
5/9/2010	9:27:05 AM	H2 valve closed
5/9/2010	9:27:05 AM	BCl3 valve closed
5/9/2010	9:27:05 AM	PH3 valve closed
5/9/2010	9:27:05 AM	SiCl4 pre valve closed
5/9/2010	9:27:05 AM	SiCl4 post valve closed
5/9/2010	9:27:05 AM	Bubbler valve closed
5/9/2010	9:27:05 AM	Main Vac valve opened
5/9/2010	9:27:05 AM	Bypass valve opened
5/9/2010	9:27:05 AM	Helium MFC set to  0.000000
5/9/2010	9:27:05 AM	H2 MFC set to  0.000000
5/9/2010	9:27:05 AM	BCl3 MFC set to  0.000000
5/9/2010	9:27:05 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:27:05 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:27:05 AM	Tube furnace set to 0
5/9/2010	9:32:05 AM	H2 valve closed
5/9/2010	9:32:05 AM	BCl3 valve closed
5/9/2010	9:32:05 AM	PH3 valve closed
5/9/2010	9:32:05 AM	SiCl4 pre valve closed
5/9/2010	9:32:05 AM	SiCl4 post valve closed
5/9/2010	9:32:05 AM	Main Vac valve closed
5/9/2010	9:32:05 AM	Bypass valve closed
5/9/2010	9:32:05 AM	Bubbler valve closed
5/9/2010	9:32:05 AM	Helium valve opened
5/9/2010	9:32:05 AM	Helium MFC set to  500.000000
5/9/2010	9:32:05 AM	H2 MFC set to  0.000000
5/9/2010	9:32:05 AM	BCl3 MFC set to  0.000000
5/9/2010	9:32:05 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:32:05 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:32:05 AM	Tube furnace set to 0
5/9/2010	9:33:26 AM	Helium valve closed
5/9/2010	9:33:26 AM	H2 valve closed
5/9/2010	9:33:26 AM	BCl3 valve closed
5/9/2010	9:33:26 AM	PH3 valve closed
5/9/2010	9:33:26 AM	SiCl4 pre valve closed
5/9/2010	9:33:26 AM	SiCl4 post valve closed
5/9/2010	9:33:26 AM	Main Vac valve closed
5/9/2010	9:33:26 AM	Bypass valve closed
5/9/2010	9:33:26 AM	Bubbler valve closed
5/9/2010	9:33:26 AM	Helium MFC set to  0.000000
5/9/2010	9:33:26 AM	H2 MFC set to  0.000000
5/9/2010	9:33:26 AM	BCl3 MFC set to  0.000000
5/9/2010	9:33:26 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:33:26 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:33:26 AM	Tube furnace set to 0
5/9/2010	9:33:41 AM	Helium valve closed
5/9/2010	9:33:41 AM	H2 valve closed
5/9/2010	9:33:41 AM	BCl3 valve closed
5/9/2010	9:33:41 AM	PH3 valve closed
5/9/2010	9:33:41 AM	SiCl4 pre valve closed
5/9/2010	9:33:41 AM	SiCl4 post valve closed
5/9/2010	9:33:41 AM	Main Vac valve closed
5/9/2010	9:33:41 AM	Bubbler valve closed
5/9/2010	9:33:41 AM	Bypass valve opened
5/9/2010	9:33:41 AM	Helium MFC set to  0.000000
5/9/2010	9:33:41 AM	H2 MFC set to  0.000000
5/9/2010	9:33:41 AM	BCl3 MFC set to  0.000000
5/9/2010	9:33:41 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:33:41 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:33:41 AM	Tube furnace set to 0
5/9/2010	9:34:11 AM	Helium valve closed
5/9/2010	9:34:11 AM	H2 valve closed
5/9/2010	9:34:11 AM	BCl3 valve closed
5/9/2010	9:34:11 AM	PH3 valve closed
5/9/2010	9:34:11 AM	SiCl4 pre valve closed
5/9/2010	9:34:11 AM	SiCl4 post valve closed
5/9/2010	9:34:11 AM	Bubbler valve closed
5/9/2010	9:34:12 AM	Main Vac valve opened
5/9/2010	9:34:12 AM	Bypass valve opened
5/9/2010	9:34:12 AM	Helium MFC set to  0.000000
5/9/2010	9:34:12 AM	H2 MFC set to  0.000000
5/9/2010	9:34:12 AM	BCl3 MFC set to  0.000000
5/9/2010	9:34:12 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:34:12 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:34:12 AM	Tube furnace set to 0
5/9/2010	9:39:12 AM	Helium valve closed
5/9/2010	9:39:12 AM	H2 valve closed
5/9/2010	9:39:12 AM	BCl3 valve closed
5/9/2010	9:39:12 AM	PH3 valve closed
5/9/2010	9:39:12 AM	SiCl4 pre valve closed
5/9/2010	9:39:12 AM	SiCl4 post valve closed
5/9/2010	9:39:12 AM	Bubbler valve closed
5/9/2010	9:39:12 AM	Main Vac valve opened
5/9/2010	9:39:12 AM	Bypass valve opened
5/9/2010	9:39:12 AM	Helium MFC set to  0.000000
5/9/2010	9:39:12 AM	H2 MFC set to  0.000000
5/9/2010	9:39:12 AM	BCl3 MFC set to  0.000000
5/9/2010	9:39:12 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:39:12 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:39:12 AM	Tube furnace set to 0
5/9/2010	9:39:13 AM	Run finished at 9:39 AM
5/9/2010	9:39:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/9/2010	9:45:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/9/2010	9:45:47 AM	Recipe started at 9:45 AM
5/9/2010	9:45:47 AM	Helium valve closed
5/9/2010	9:45:47 AM	H2 valve closed
5/9/2010	9:45:47 AM	BCl3 valve closed
5/9/2010	9:45:47 AM	PH3 valve closed
5/9/2010	9:45:47 AM	SiCl4 pre valve closed
5/9/2010	9:45:47 AM	SiCl4 post valve closed
5/9/2010	9:45:47 AM	Main Vac valve closed
5/9/2010	9:45:47 AM	Bypass valve closed
5/9/2010	9:45:47 AM	Bubbler valve closed
5/9/2010	9:45:47 AM	Helium MFC set to  0.000000
5/9/2010	9:45:47 AM	H2 MFC set to  0.000000
5/9/2010	9:45:47 AM	BCl3 MFC set to  0.000000
5/9/2010	9:45:47 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:45:47 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:45:47 AM	Tube furnace set to 0
5/9/2010	9:45:48 AM	Run finished at 9:45 AM
5/9/2010	9:45:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/9/2010	9:46:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	9:46:05 AM	Recipe started at 9:46 AM
5/9/2010	9:46:05 AM	Helium valve closed
5/9/2010	9:46:05 AM	H2 valve closed
5/9/2010	9:46:05 AM	BCl3 valve closed
5/9/2010	9:46:05 AM	PH3 valve closed
5/9/2010	9:46:05 AM	SiCl4 pre valve closed
5/9/2010	9:46:05 AM	SiCl4 post valve closed
5/9/2010	9:46:05 AM	Main Vac valve closed
5/9/2010	9:46:05 AM	Bubbler valve closed
5/9/2010	9:46:05 AM	Bypass valve opened
5/9/2010	9:46:05 AM	Helium MFC set to  0.000000
5/9/2010	9:46:05 AM	H2 MFC set to  0.000000
5/9/2010	9:46:05 AM	BCl3 MFC set to  0.000000
5/9/2010	9:46:05 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:46:05 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:46:05 AM	Tube furnace set to 0
5/9/2010	9:46:05 AM	Helium valve closed
5/9/2010	9:46:05 AM	H2 valve closed
5/9/2010	9:46:05 AM	BCl3 valve closed
5/9/2010	9:46:05 AM	PH3 valve closed
5/9/2010	9:46:05 AM	SiCl4 pre valve closed
5/9/2010	9:46:05 AM	SiCl4 post valve closed
5/9/2010	9:46:05 AM	Bubbler valve closed
5/9/2010	9:46:05 AM	Main Vac valve opened
5/9/2010	9:46:05 AM	Bypass valve opened
5/9/2010	9:46:05 AM	Helium MFC set to  0.000000
5/9/2010	9:46:05 AM	H2 MFC set to  0.000000
5/9/2010	9:46:05 AM	BCl3 MFC set to  0.000000
5/9/2010	9:46:05 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:46:05 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:46:05 AM	Tube furnace set to 0
5/9/2010	9:46:06 AM	Run finished at 9:46 AM
5/9/2010	9:46:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	9:47:14 AM	Recipe started at 9:47 AM
5/9/2010	9:47:14 AM	Helium valve closed
5/9/2010	9:47:14 AM	BCl3 valve closed
5/9/2010	9:47:14 AM	PH3 valve closed
5/9/2010	9:47:14 AM	SiCl4 pre valve closed
5/9/2010	9:47:14 AM	SiCl4 post valve closed
5/9/2010	9:47:14 AM	Main Vac valve closed
5/9/2010	9:47:14 AM	Bypass valve closed
5/9/2010	9:47:14 AM	Bubbler valve closed
5/9/2010	9:47:14 AM	H2 valve opened
5/9/2010	9:47:14 AM	Helium MFC set to  0.000000
5/9/2010	9:47:14 AM	H2 MFC set to  500.000000
5/9/2010	9:47:14 AM	BCl3 MFC set to  0.000000
5/9/2010	9:47:14 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:47:14 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:47:15 AM	Tube furnace set to 0
5/9/2010	9:48:36 AM	Helium valve closed
5/9/2010	9:48:36 AM	BCl3 valve closed
5/9/2010	9:48:36 AM	PH3 valve closed
5/9/2010	9:48:36 AM	SiCl4 pre valve closed
5/9/2010	9:48:36 AM	SiCl4 post valve closed
5/9/2010	9:48:36 AM	Main Vac valve closed
5/9/2010	9:48:36 AM	Bypass valve closed
5/9/2010	9:48:36 AM	H2 valve opened
5/9/2010	9:48:36 AM	Bubbler valve opened
5/9/2010	9:48:36 AM	Helium MFC set to  0.000000
5/9/2010	9:48:36 AM	H2 MFC set to  500.000000
5/9/2010	9:48:36 AM	BCl3 MFC set to  0.000000
5/9/2010	9:48:36 AM	SiCl4 MFC set to  0.000000
5/9/2010	9:48:36 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	9:48:36 AM	Tube furnace set to 1000
5/9/2010	10:08:36 AM	Helium valve closed
5/9/2010	10:08:36 AM	PH3 valve closed
5/9/2010	10:08:36 AM	Main Vac valve closed
5/9/2010	10:08:36 AM	Bypass valve closed
5/9/2010	10:08:36 AM	H2 valve opened
5/9/2010	10:08:36 AM	BCl3 valve opened
5/9/2010	10:08:36 AM	SiCl4 pre valve opened
5/9/2010	10:08:36 AM	SiCl4 post valve opened
5/9/2010	10:08:36 AM	Bubbler valve opened
5/9/2010	10:08:36 AM	Helium MFC set to  0.000000
5/9/2010	10:08:36 AM	H2 MFC set to  500.000000
5/9/2010	10:08:36 AM	BCl3 MFC set to  35.000000
5/9/2010	10:08:36 AM	SiCl4 MFC set to  325.000000
5/9/2010	10:08:36 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	10:08:36 AM	Tube furnace set to 1000
5/9/2010	10:23:36 AM	H2 valve closed
5/9/2010	10:23:36 AM	BCl3 valve closed
5/9/2010	10:23:36 AM	PH3 valve closed
5/9/2010	10:23:36 AM	SiCl4 pre valve closed
5/9/2010	10:23:36 AM	SiCl4 post valve closed
5/9/2010	10:23:36 AM	Main Vac valve closed
5/9/2010	10:23:36 AM	Bypass valve closed
5/9/2010	10:23:36 AM	Helium valve opened
5/9/2010	10:23:36 AM	Bubbler valve opened
5/9/2010	10:23:36 AM	Helium MFC set to  500.000000
5/9/2010	10:23:36 AM	H2 MFC set to  0.000000
5/9/2010	10:23:36 AM	BCl3 MFC set to  0.000000
5/9/2010	10:23:36 AM	SiCl4 MFC set to  0.000000
5/9/2010	10:23:36 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	10:23:36 AM	Tube furnace set to 0
5/9/2010	10:43:36 AM	Helium valve closed
5/9/2010	10:43:36 AM	H2 valve closed
5/9/2010	10:43:36 AM	BCl3 valve closed
5/9/2010	10:43:36 AM	PH3 valve closed
5/9/2010	10:43:36 AM	SiCl4 pre valve closed
5/9/2010	10:43:36 AM	SiCl4 post valve closed
5/9/2010	10:43:36 AM	Main Vac valve closed
5/9/2010	10:43:36 AM	Bypass valve closed
5/9/2010	10:43:36 AM	Bubbler valve closed
5/9/2010	10:43:36 AM	Helium MFC set to  0.000000
5/9/2010	10:43:36 AM	H2 MFC set to  0.000000
5/9/2010	10:43:36 AM	BCl3 MFC set to  0.000000
5/9/2010	10:43:36 AM	SiCl4 MFC set to  0.000000
5/9/2010	10:43:36 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	10:43:36 AM	Tube furnace set to 0
5/9/2010	10:43:36 AM	Run finished at 10:43 AM
5/9/2010	10:54:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	10:54:11 AM	Recipe started at 10:54 AM
5/9/2010	10:54:11 AM	H2 valve closed
5/9/2010	10:54:11 AM	BCl3 valve closed
5/9/2010	10:54:11 AM	PH3 valve closed
5/9/2010	10:54:11 AM	SiCl4 pre valve closed
5/9/2010	10:54:11 AM	SiCl4 post valve closed
5/9/2010	10:54:11 AM	Main Vac valve closed
5/9/2010	10:54:11 AM	Bypass valve closed
5/9/2010	10:54:11 AM	Bubbler valve closed
5/9/2010	10:54:11 AM	Helium valve opened
5/9/2010	10:54:11 AM	Helium MFC set to  500.000000
5/9/2010	10:54:11 AM	H2 MFC set to  0.000000
5/9/2010	10:54:11 AM	BCl3 MFC set to  0.000000
5/9/2010	10:54:11 AM	SiCl4 MFC set to  0.000000
5/9/2010	10:54:11 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	10:54:11 AM	Tube furnace set to 0
5/9/2010	10:54:14 AM	Helium valve closed
5/9/2010	10:54:14 AM	H2 valve closed
5/9/2010	10:54:14 AM	BCl3 valve closed
5/9/2010	10:54:14 AM	PH3 valve closed
5/9/2010	10:54:14 AM	SiCl4 pre valve closed
5/9/2010	10:54:14 AM	SiCl4 post valve closed
5/9/2010	10:54:14 AM	Main Vac valve closed
5/9/2010	10:54:14 AM	Bypass valve closed
5/9/2010	10:54:14 AM	Bubbler valve closed
5/9/2010	10:54:14 AM	Helium MFC set to  0.000000
5/9/2010	10:54:14 AM	H2 MFC set to  0.000000
5/9/2010	10:54:14 AM	BCl3 MFC set to  0.000000
5/9/2010	10:54:14 AM	SiCl4 MFC set to  0.000000
5/9/2010	10:54:14 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	10:54:15 AM	Tube furnace set to 0
5/9/2010	10:54:15 AM	Run finished at 10:54 AM
5/9/2010	10:54:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	11:07:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/9/2010	11:07:22 AM	Recipe started at 11:07 AM
5/9/2010	11:07:22 AM	H2 valve closed
5/9/2010	11:07:22 AM	BCl3 valve closed
5/9/2010	11:07:22 AM	PH3 valve closed
5/9/2010	11:07:22 AM	SiCl4 pre valve closed
5/9/2010	11:07:22 AM	SiCl4 post valve closed
5/9/2010	11:07:22 AM	Main Vac valve closed
5/9/2010	11:07:22 AM	Bypass valve closed
5/9/2010	11:07:22 AM	Bubbler valve closed
5/9/2010	11:07:22 AM	Helium valve opened
5/9/2010	11:07:22 AM	Helium MFC set to  500.000000
5/9/2010	11:07:22 AM	H2 MFC set to  0.000000
5/9/2010	11:07:22 AM	BCl3 MFC set to  0.000000
5/9/2010	11:07:22 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:07:22 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:07:22 AM	Tube furnace set to 0
5/9/2010	11:07:24 AM	Helium valve closed
5/9/2010	11:07:24 AM	H2 valve closed
5/9/2010	11:07:24 AM	BCl3 valve closed
5/9/2010	11:07:24 AM	PH3 valve closed
5/9/2010	11:07:24 AM	SiCl4 pre valve closed
5/9/2010	11:07:24 AM	SiCl4 post valve closed
5/9/2010	11:07:24 AM	Main Vac valve closed
5/9/2010	11:07:24 AM	Bypass valve closed
5/9/2010	11:07:24 AM	Bubbler valve closed
5/9/2010	11:07:24 AM	Helium MFC set to  0.000000
5/9/2010	11:07:24 AM	H2 MFC set to  0.000000
5/9/2010	11:07:24 AM	BCl3 MFC set to  0.000000
5/9/2010	11:07:24 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:07:24 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:07:24 AM	Tube furnace set to 0
5/9/2010	11:07:39 AM	Helium valve closed
5/9/2010	11:07:39 AM	H2 valve closed
5/9/2010	11:07:39 AM	BCl3 valve closed
5/9/2010	11:07:39 AM	PH3 valve closed
5/9/2010	11:07:39 AM	SiCl4 pre valve closed
5/9/2010	11:07:39 AM	SiCl4 post valve closed
5/9/2010	11:07:39 AM	Main Vac valve closed
5/9/2010	11:07:39 AM	Bubbler valve closed
5/9/2010	11:07:39 AM	Bypass valve opened
5/9/2010	11:07:39 AM	Helium MFC set to  0.000000
5/9/2010	11:07:39 AM	H2 MFC set to  0.000000
5/9/2010	11:07:39 AM	BCl3 MFC set to  0.000000
5/9/2010	11:07:39 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:07:39 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:07:39 AM	Tube furnace set to 0
5/9/2010	11:08:23 AM	Helium valve closed
5/9/2010	11:08:23 AM	H2 valve closed
5/9/2010	11:08:23 AM	BCl3 valve closed
5/9/2010	11:08:23 AM	PH3 valve closed
5/9/2010	11:08:23 AM	SiCl4 pre valve closed
5/9/2010	11:08:23 AM	SiCl4 post valve closed
5/9/2010	11:08:23 AM	Bubbler valve closed
5/9/2010	11:08:23 AM	Main Vac valve opened
5/9/2010	11:08:23 AM	Bypass valve opened
5/9/2010	11:08:23 AM	Helium MFC set to  0.000000
5/9/2010	11:08:23 AM	H2 MFC set to  0.000000
5/9/2010	11:08:23 AM	BCl3 MFC set to  0.000000
5/9/2010	11:08:23 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:08:23 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:08:23 AM	Tube furnace set to 0
5/9/2010	11:13:23 AM	H2 valve closed
5/9/2010	11:13:23 AM	BCl3 valve closed
5/9/2010	11:13:23 AM	PH3 valve closed
5/9/2010	11:13:23 AM	SiCl4 pre valve closed
5/9/2010	11:13:23 AM	SiCl4 post valve closed
5/9/2010	11:13:23 AM	Main Vac valve closed
5/9/2010	11:13:23 AM	Bypass valve closed
5/9/2010	11:13:23 AM	Bubbler valve closed
5/9/2010	11:13:23 AM	Helium valve opened
5/9/2010	11:13:23 AM	Helium MFC set to  500.000000
5/9/2010	11:13:23 AM	H2 MFC set to  0.000000
5/9/2010	11:13:23 AM	BCl3 MFC set to  0.000000
5/9/2010	11:13:23 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:13:23 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:13:23 AM	Tube furnace set to 0
5/9/2010	11:14:42 AM	Helium valve closed
5/9/2010	11:14:42 AM	H2 valve closed
5/9/2010	11:14:42 AM	BCl3 valve closed
5/9/2010	11:14:42 AM	PH3 valve closed
5/9/2010	11:14:42 AM	SiCl4 pre valve closed
5/9/2010	11:14:42 AM	SiCl4 post valve closed
5/9/2010	11:14:42 AM	Main Vac valve closed
5/9/2010	11:14:42 AM	Bypass valve closed
5/9/2010	11:14:42 AM	Bubbler valve closed
5/9/2010	11:14:42 AM	Helium MFC set to  0.000000
5/9/2010	11:14:42 AM	H2 MFC set to  0.000000
5/9/2010	11:14:42 AM	BCl3 MFC set to  0.000000
5/9/2010	11:14:42 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:14:42 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:14:42 AM	Tube furnace set to 0
5/9/2010	11:14:57 AM	Helium valve closed
5/9/2010	11:14:57 AM	H2 valve closed
5/9/2010	11:14:57 AM	BCl3 valve closed
5/9/2010	11:14:57 AM	PH3 valve closed
5/9/2010	11:14:57 AM	SiCl4 pre valve closed
5/9/2010	11:14:57 AM	SiCl4 post valve closed
5/9/2010	11:14:57 AM	Main Vac valve closed
5/9/2010	11:14:57 AM	Bubbler valve closed
5/9/2010	11:14:57 AM	Bypass valve opened
5/9/2010	11:14:57 AM	Helium MFC set to  0.000000
5/9/2010	11:14:57 AM	H2 MFC set to  0.000000
5/9/2010	11:14:57 AM	BCl3 MFC set to  0.000000
5/9/2010	11:14:57 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:14:57 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:14:57 AM	Tube furnace set to 0
5/9/2010	11:15:26 AM	Helium valve closed
5/9/2010	11:15:26 AM	H2 valve closed
5/9/2010	11:15:26 AM	BCl3 valve closed
5/9/2010	11:15:26 AM	PH3 valve closed
5/9/2010	11:15:26 AM	SiCl4 pre valve closed
5/9/2010	11:15:26 AM	SiCl4 post valve closed
5/9/2010	11:15:26 AM	Bubbler valve closed
5/9/2010	11:15:26 AM	Main Vac valve opened
5/9/2010	11:15:26 AM	Bypass valve opened
5/9/2010	11:15:26 AM	Helium MFC set to  0.000000
5/9/2010	11:15:26 AM	H2 MFC set to  0.000000
5/9/2010	11:15:26 AM	BCl3 MFC set to  0.000000
5/9/2010	11:15:26 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:15:26 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:15:26 AM	Tube furnace set to 0
5/9/2010	11:20:26 AM	H2 valve closed
5/9/2010	11:20:26 AM	BCl3 valve closed
5/9/2010	11:20:26 AM	PH3 valve closed
5/9/2010	11:20:26 AM	SiCl4 pre valve closed
5/9/2010	11:20:26 AM	SiCl4 post valve closed
5/9/2010	11:20:26 AM	Main Vac valve closed
5/9/2010	11:20:26 AM	Bypass valve closed
5/9/2010	11:20:26 AM	Bubbler valve closed
5/9/2010	11:20:27 AM	Helium valve opened
5/9/2010	11:20:27 AM	Helium MFC set to  500.000000
5/9/2010	11:20:27 AM	H2 MFC set to  0.000000
5/9/2010	11:20:27 AM	BCl3 MFC set to  0.000000
5/9/2010	11:20:27 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:20:27 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:20:27 AM	Tube furnace set to 0
5/9/2010	11:21:45 AM	Helium valve closed
5/9/2010	11:21:45 AM	H2 valve closed
5/9/2010	11:21:45 AM	BCl3 valve closed
5/9/2010	11:21:45 AM	PH3 valve closed
5/9/2010	11:21:45 AM	SiCl4 pre valve closed
5/9/2010	11:21:45 AM	SiCl4 post valve closed
5/9/2010	11:21:45 AM	Main Vac valve closed
5/9/2010	11:21:45 AM	Bypass valve closed
5/9/2010	11:21:45 AM	Bubbler valve closed
5/9/2010	11:21:45 AM	Helium MFC set to  0.000000
5/9/2010	11:21:45 AM	H2 MFC set to  0.000000
5/9/2010	11:21:45 AM	BCl3 MFC set to  0.000000
5/9/2010	11:21:45 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:21:45 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:21:45 AM	Tube furnace set to 0
5/9/2010	11:22:00 AM	Helium valve closed
5/9/2010	11:22:00 AM	H2 valve closed
5/9/2010	11:22:00 AM	BCl3 valve closed
5/9/2010	11:22:00 AM	PH3 valve closed
5/9/2010	11:22:00 AM	SiCl4 pre valve closed
5/9/2010	11:22:00 AM	SiCl4 post valve closed
5/9/2010	11:22:00 AM	Main Vac valve closed
5/9/2010	11:22:00 AM	Bubbler valve closed
5/9/2010	11:22:00 AM	Bypass valve opened
5/9/2010	11:22:00 AM	Helium MFC set to  0.000000
5/9/2010	11:22:00 AM	H2 MFC set to  0.000000
5/9/2010	11:22:00 AM	BCl3 MFC set to  0.000000
5/9/2010	11:22:00 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:22:00 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:22:00 AM	Tube furnace set to 0
5/9/2010	11:22:30 AM	Helium valve closed
5/9/2010	11:22:30 AM	H2 valve closed
5/9/2010	11:22:30 AM	BCl3 valve closed
5/9/2010	11:22:30 AM	PH3 valve closed
5/9/2010	11:22:30 AM	SiCl4 pre valve closed
5/9/2010	11:22:30 AM	SiCl4 post valve closed
5/9/2010	11:22:30 AM	Bubbler valve closed
5/9/2010	11:22:30 AM	Main Vac valve opened
5/9/2010	11:22:30 AM	Bypass valve opened
5/9/2010	11:22:30 AM	Helium MFC set to  0.000000
5/9/2010	11:22:30 AM	H2 MFC set to  0.000000
5/9/2010	11:22:30 AM	BCl3 MFC set to  0.000000
5/9/2010	11:22:30 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:22:30 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:22:30 AM	Tube furnace set to 0
5/9/2010	11:27:30 AM	Helium valve closed
5/9/2010	11:27:30 AM	H2 valve closed
5/9/2010	11:27:30 AM	BCl3 valve closed
5/9/2010	11:27:30 AM	PH3 valve closed
5/9/2010	11:27:30 AM	SiCl4 pre valve closed
5/9/2010	11:27:30 AM	SiCl4 post valve closed
5/9/2010	11:27:30 AM	Bubbler valve closed
5/9/2010	11:27:30 AM	Main Vac valve opened
5/9/2010	11:27:30 AM	Bypass valve opened
5/9/2010	11:27:30 AM	Helium MFC set to  0.000000
5/9/2010	11:27:30 AM	H2 MFC set to  0.000000
5/9/2010	11:27:30 AM	BCl3 MFC set to  0.000000
5/9/2010	11:27:30 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:27:30 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:27:30 AM	Tube furnace set to 0
5/9/2010	11:27:31 AM	Run finished at 11:27 AM
5/9/2010	11:27:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/9/2010	11:28:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/9/2010	11:28:47 AM	Recipe started at 11:28 AM
5/9/2010	11:28:47 AM	Helium valve closed
5/9/2010	11:28:47 AM	H2 valve closed
5/9/2010	11:28:47 AM	BCl3 valve closed
5/9/2010	11:28:47 AM	PH3 valve closed
5/9/2010	11:28:47 AM	SiCl4 pre valve closed
5/9/2010	11:28:47 AM	SiCl4 post valve closed
5/9/2010	11:28:47 AM	Main Vac valve closed
5/9/2010	11:28:47 AM	Bypass valve closed
5/9/2010	11:28:47 AM	Bubbler valve closed
5/9/2010	11:28:47 AM	Helium MFC set to  0.000000
5/9/2010	11:28:47 AM	H2 MFC set to  0.000000
5/9/2010	11:28:47 AM	BCl3 MFC set to  0.000000
5/9/2010	11:28:47 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:28:47 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:28:47 AM	Tube furnace set to 0
5/9/2010	11:28:48 AM	Run finished at 11:28 AM
5/9/2010	11:28:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/9/2010	11:29:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	11:29:27 AM	Recipe started at 11:29 AM
5/9/2010	11:29:27 AM	H2 valve closed
5/9/2010	11:29:27 AM	BCl3 valve closed
5/9/2010	11:29:27 AM	PH3 valve closed
5/9/2010	11:29:27 AM	SiCl4 pre valve closed
5/9/2010	11:29:27 AM	SiCl4 post valve closed
5/9/2010	11:29:27 AM	Main Vac valve closed
5/9/2010	11:29:27 AM	Bypass valve closed
5/9/2010	11:29:27 AM	Bubbler valve closed
5/9/2010	11:29:27 AM	Helium valve opened
5/9/2010	11:29:27 AM	Helium MFC set to  500.000000
5/9/2010	11:29:27 AM	H2 MFC set to  0.000000
5/9/2010	11:29:27 AM	BCl3 MFC set to  0.000000
5/9/2010	11:29:27 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:29:27 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:29:27 AM	Tube furnace set to 0
5/9/2010	11:30:44 AM	Helium valve closed
5/9/2010	11:30:44 AM	H2 valve closed
5/9/2010	11:30:44 AM	BCl3 valve closed
5/9/2010	11:30:44 AM	PH3 valve closed
5/9/2010	11:30:44 AM	SiCl4 pre valve closed
5/9/2010	11:30:44 AM	SiCl4 post valve closed
5/9/2010	11:30:44 AM	Main Vac valve closed
5/9/2010	11:30:44 AM	Bypass valve closed
5/9/2010	11:30:44 AM	Bubbler valve closed
5/9/2010	11:30:44 AM	Helium MFC set to  0.000000
5/9/2010	11:30:44 AM	H2 MFC set to  0.000000
5/9/2010	11:30:44 AM	BCl3 MFC set to  0.000000
5/9/2010	11:30:44 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:30:44 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:30:44 AM	Tube furnace set to 0
5/9/2010	11:30:44 AM	Run finished at 11:30 AM
5/9/2010	11:30:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	11:33:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	11:33:11 AM	Recipe started at 11:33 AM
5/9/2010	11:33:11 AM	Helium valve closed
5/9/2010	11:33:11 AM	H2 valve closed
5/9/2010	11:33:11 AM	BCl3 valve closed
5/9/2010	11:33:11 AM	PH3 valve closed
5/9/2010	11:33:11 AM	SiCl4 pre valve closed
5/9/2010	11:33:11 AM	SiCl4 post valve closed
5/9/2010	11:33:11 AM	Main Vac valve closed
5/9/2010	11:33:11 AM	Bubbler valve closed
5/9/2010	11:33:11 AM	Bypass valve opened
5/9/2010	11:33:11 AM	Helium MFC set to  0.000000
5/9/2010	11:33:11 AM	H2 MFC set to  0.000000
5/9/2010	11:33:11 AM	BCl3 MFC set to  0.000000
5/9/2010	11:33:11 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:33:11 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:33:11 AM	Tube furnace set to 0
5/9/2010	11:33:48 AM	Helium valve closed
5/9/2010	11:33:48 AM	H2 valve closed
5/9/2010	11:33:48 AM	BCl3 valve closed
5/9/2010	11:33:48 AM	PH3 valve closed
5/9/2010	11:33:48 AM	SiCl4 pre valve closed
5/9/2010	11:33:48 AM	SiCl4 post valve closed
5/9/2010	11:33:48 AM	Bubbler valve closed
5/9/2010	11:33:48 AM	Main Vac valve opened
5/9/2010	11:33:48 AM	Bypass valve opened
5/9/2010	11:33:48 AM	Helium MFC set to  0.000000
5/9/2010	11:33:48 AM	H2 MFC set to  0.000000
5/9/2010	11:33:48 AM	BCl3 MFC set to  0.000000
5/9/2010	11:33:48 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:33:48 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:33:48 AM	Tube furnace set to 0
5/9/2010	11:33:48 AM	Run finished at 11:33 AM
5/9/2010	11:33:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	11:35:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/9/2010	11:35:50 AM	Recipe started at 11:35 AM
5/9/2010	11:35:50 AM	H2 valve closed
5/9/2010	11:35:50 AM	BCl3 valve closed
5/9/2010	11:35:50 AM	PH3 valve closed
5/9/2010	11:35:50 AM	SiCl4 pre valve closed
5/9/2010	11:35:50 AM	SiCl4 post valve closed
5/9/2010	11:35:50 AM	Main Vac valve closed
5/9/2010	11:35:50 AM	Bypass valve closed
5/9/2010	11:35:50 AM	Bubbler valve closed
5/9/2010	11:35:50 AM	Helium valve opened
5/9/2010	11:35:50 AM	Helium MFC set to  500.000000
5/9/2010	11:35:50 AM	H2 MFC set to  0.000000
5/9/2010	11:35:50 AM	BCl3 MFC set to  0.000000
5/9/2010	11:35:50 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:35:50 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:35:50 AM	Tube furnace set to 0
5/9/2010	11:37:09 AM	Helium valve closed
5/9/2010	11:37:09 AM	H2 valve closed
5/9/2010	11:37:09 AM	BCl3 valve closed
5/9/2010	11:37:09 AM	PH3 valve closed
5/9/2010	11:37:09 AM	SiCl4 pre valve closed
5/9/2010	11:37:09 AM	SiCl4 post valve closed
5/9/2010	11:37:09 AM	Main Vac valve closed
5/9/2010	11:37:09 AM	Bypass valve closed
5/9/2010	11:37:09 AM	Bubbler valve closed
5/9/2010	11:37:09 AM	Helium MFC set to  0.000000
5/9/2010	11:37:09 AM	H2 MFC set to  0.000000
5/9/2010	11:37:09 AM	BCl3 MFC set to  0.000000
5/9/2010	11:37:09 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:37:09 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:37:09 AM	Tube furnace set to 0
5/9/2010	11:37:24 AM	Helium valve closed
5/9/2010	11:37:24 AM	H2 valve closed
5/9/2010	11:37:24 AM	BCl3 valve closed
5/9/2010	11:37:24 AM	PH3 valve closed
5/9/2010	11:37:24 AM	SiCl4 pre valve closed
5/9/2010	11:37:24 AM	SiCl4 post valve closed
5/9/2010	11:37:24 AM	Main Vac valve closed
5/9/2010	11:37:24 AM	Bubbler valve closed
5/9/2010	11:37:24 AM	Bypass valve opened
5/9/2010	11:37:24 AM	Helium MFC set to  0.000000
5/9/2010	11:37:24 AM	H2 MFC set to  0.000000
5/9/2010	11:37:24 AM	BCl3 MFC set to  0.000000
5/9/2010	11:37:24 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:37:24 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:37:24 AM	Tube furnace set to 0
5/9/2010	11:37:54 AM	Helium valve closed
5/9/2010	11:37:54 AM	H2 valve closed
5/9/2010	11:37:54 AM	BCl3 valve closed
5/9/2010	11:37:54 AM	PH3 valve closed
5/9/2010	11:37:54 AM	SiCl4 pre valve closed
5/9/2010	11:37:54 AM	SiCl4 post valve closed
5/9/2010	11:37:54 AM	Bubbler valve closed
5/9/2010	11:37:54 AM	Main Vac valve opened
5/9/2010	11:37:54 AM	Bypass valve opened
5/9/2010	11:37:54 AM	Helium MFC set to  0.000000
5/9/2010	11:37:54 AM	H2 MFC set to  0.000000
5/9/2010	11:37:54 AM	BCl3 MFC set to  0.000000
5/9/2010	11:37:54 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:37:54 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:37:54 AM	Tube furnace set to 0
5/9/2010	11:42:54 AM	H2 valve closed
5/9/2010	11:42:54 AM	BCl3 valve closed
5/9/2010	11:42:54 AM	PH3 valve closed
5/9/2010	11:42:54 AM	SiCl4 pre valve closed
5/9/2010	11:42:54 AM	SiCl4 post valve closed
5/9/2010	11:42:54 AM	Main Vac valve closed
5/9/2010	11:42:54 AM	Bypass valve closed
5/9/2010	11:42:54 AM	Bubbler valve closed
5/9/2010	11:42:54 AM	Helium valve opened
5/9/2010	11:42:54 AM	Helium MFC set to  500.000000
5/9/2010	11:42:54 AM	H2 MFC set to  0.000000
5/9/2010	11:42:54 AM	BCl3 MFC set to  0.000000
5/9/2010	11:42:54 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:42:54 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:42:54 AM	Tube furnace set to 0
5/9/2010	11:44:13 AM	Helium valve closed
5/9/2010	11:44:13 AM	H2 valve closed
5/9/2010	11:44:13 AM	BCl3 valve closed
5/9/2010	11:44:13 AM	PH3 valve closed
5/9/2010	11:44:13 AM	SiCl4 pre valve closed
5/9/2010	11:44:13 AM	SiCl4 post valve closed
5/9/2010	11:44:13 AM	Main Vac valve closed
5/9/2010	11:44:13 AM	Bypass valve closed
5/9/2010	11:44:13 AM	Bubbler valve closed
5/9/2010	11:44:13 AM	Helium MFC set to  0.000000
5/9/2010	11:44:13 AM	H2 MFC set to  0.000000
5/9/2010	11:44:13 AM	BCl3 MFC set to  0.000000
5/9/2010	11:44:13 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:44:13 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:44:13 AM	Tube furnace set to 0
5/9/2010	11:44:28 AM	Helium valve closed
5/9/2010	11:44:29 AM	H2 valve closed
5/9/2010	11:44:29 AM	BCl3 valve closed
5/9/2010	11:44:29 AM	PH3 valve closed
5/9/2010	11:44:29 AM	SiCl4 pre valve closed
5/9/2010	11:44:29 AM	SiCl4 post valve closed
5/9/2010	11:44:29 AM	Main Vac valve closed
5/9/2010	11:44:29 AM	Bubbler valve closed
5/9/2010	11:44:29 AM	Bypass valve opened
5/9/2010	11:44:29 AM	Helium MFC set to  0.000000
5/9/2010	11:44:29 AM	H2 MFC set to  0.000000
5/9/2010	11:44:29 AM	BCl3 MFC set to  0.000000
5/9/2010	11:44:29 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:44:29 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:44:29 AM	Tube furnace set to 0
5/9/2010	11:44:58 AM	Helium valve closed
5/9/2010	11:44:58 AM	H2 valve closed
5/9/2010	11:44:58 AM	BCl3 valve closed
5/9/2010	11:44:58 AM	PH3 valve closed
5/9/2010	11:44:58 AM	SiCl4 pre valve closed
5/9/2010	11:44:58 AM	SiCl4 post valve closed
5/9/2010	11:44:58 AM	Bubbler valve closed
5/9/2010	11:44:58 AM	Main Vac valve opened
5/9/2010	11:44:58 AM	Bypass valve opened
5/9/2010	11:44:58 AM	Helium MFC set to  0.000000
5/9/2010	11:44:58 AM	H2 MFC set to  0.000000
5/9/2010	11:44:58 AM	BCl3 MFC set to  0.000000
5/9/2010	11:44:58 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:44:58 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:44:58 AM	Tube furnace set to 0
5/9/2010	11:45:44 AM	Run aborted at 11:45 AM
5/9/2010	11:45:44 AM	Helium valve closed
5/9/2010	11:45:44 AM	H2 valve closed
5/9/2010	11:45:44 AM	BCl3 valve closed
5/9/2010	11:45:44 AM	PH3 valve closed
5/9/2010	11:45:44 AM	SiCl4 pre valve closed
5/9/2010	11:45:44 AM	SiCl4 post valve closed
5/9/2010	11:45:44 AM	Bypass valve closed
5/9/2010	11:45:44 AM	Main Vac valve closed
5/9/2010	11:45:44 AM	Bubbler valve closed
5/9/2010	11:45:44 AM	Helium MFC set to  0.000000
5/9/2010	11:45:44 AM	H2 MFC set to  0.000000
5/9/2010	11:45:44 AM	BCl3 MFC set to  0.000000
5/9/2010	11:45:44 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:45:45 AM	Tube furnace set to 0
5/9/2010	11:45:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/9/2010	11:45:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	11:45:57 AM	Recipe started at 11:45 AM
5/9/2010	11:45:57 AM	H2 valve closed
5/9/2010	11:45:57 AM	BCl3 valve closed
5/9/2010	11:45:57 AM	PH3 valve closed
5/9/2010	11:45:57 AM	SiCl4 pre valve closed
5/9/2010	11:45:57 AM	SiCl4 post valve closed
5/9/2010	11:45:57 AM	Main Vac valve closed
5/9/2010	11:45:57 AM	Bypass valve closed
5/9/2010	11:45:57 AM	Bubbler valve closed
5/9/2010	11:45:57 AM	Helium valve opened
5/9/2010	11:45:57 AM	Helium MFC set to  500.000000
5/9/2010	11:45:57 AM	H2 MFC set to  0.000000
5/9/2010	11:45:57 AM	BCl3 MFC set to  0.000000
5/9/2010	11:45:57 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:45:57 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:45:57 AM	Tube furnace set to 0
5/9/2010	11:47:14 AM	Helium valve closed
5/9/2010	11:47:14 AM	H2 valve closed
5/9/2010	11:47:14 AM	BCl3 valve closed
5/9/2010	11:47:14 AM	PH3 valve closed
5/9/2010	11:47:14 AM	SiCl4 pre valve closed
5/9/2010	11:47:14 AM	SiCl4 post valve closed
5/9/2010	11:47:14 AM	Main Vac valve closed
5/9/2010	11:47:15 AM	Bypass valve closed
5/9/2010	11:47:15 AM	Bubbler valve closed
5/9/2010	11:47:15 AM	Helium MFC set to  0.000000
5/9/2010	11:47:15 AM	H2 MFC set to  0.000000
5/9/2010	11:47:15 AM	BCl3 MFC set to  0.000000
5/9/2010	11:47:15 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:47:15 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:47:15 AM	Tube furnace set to 0
5/9/2010	11:47:15 AM	Run finished at 11:47 AM
5/9/2010	11:47:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	11:50:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	11:50:30 AM	Recipe started at 11:50 AM
5/9/2010	11:50:30 AM	Helium valve closed
5/9/2010	11:50:31 AM	H2 valve closed
5/9/2010	11:50:31 AM	BCl3 valve closed
5/9/2010	11:50:31 AM	PH3 valve closed
5/9/2010	11:50:31 AM	SiCl4 pre valve closed
5/9/2010	11:50:31 AM	SiCl4 post valve closed
5/9/2010	11:50:31 AM	Main Vac valve closed
5/9/2010	11:50:31 AM	Bubbler valve closed
5/9/2010	11:50:31 AM	Bypass valve opened
5/9/2010	11:50:31 AM	Helium MFC set to  0.000000
5/9/2010	11:50:31 AM	H2 MFC set to  0.000000
5/9/2010	11:50:31 AM	BCl3 MFC set to  0.000000
5/9/2010	11:50:31 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:50:31 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:50:31 AM	Tube furnace set to 0
5/9/2010	11:51:12 AM	Helium valve closed
5/9/2010	11:51:12 AM	H2 valve closed
5/9/2010	11:51:12 AM	BCl3 valve closed
5/9/2010	11:51:12 AM	PH3 valve closed
5/9/2010	11:51:12 AM	SiCl4 pre valve closed
5/9/2010	11:51:12 AM	SiCl4 post valve closed
5/9/2010	11:51:12 AM	Bubbler valve closed
5/9/2010	11:51:12 AM	Main Vac valve opened
5/9/2010	11:51:12 AM	Bypass valve opened
5/9/2010	11:51:12 AM	Helium MFC set to  0.000000
5/9/2010	11:51:12 AM	H2 MFC set to  0.000000
5/9/2010	11:51:12 AM	BCl3 MFC set to  0.000000
5/9/2010	11:51:12 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:51:12 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:51:12 AM	Tube furnace set to 0
5/9/2010	11:51:13 AM	Run finished at 11:51 AM
5/9/2010	11:51:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	11:51:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/9/2010	11:51:45 AM	Recipe started at 11:51 AM
5/9/2010	11:51:45 AM	H2 valve closed
5/9/2010	11:51:45 AM	BCl3 valve closed
5/9/2010	11:51:45 AM	PH3 valve closed
5/9/2010	11:51:45 AM	SiCl4 pre valve closed
5/9/2010	11:51:45 AM	SiCl4 post valve closed
5/9/2010	11:51:45 AM	Main Vac valve closed
5/9/2010	11:51:45 AM	Bypass valve closed
5/9/2010	11:51:45 AM	Bubbler valve closed
5/9/2010	11:51:45 AM	Helium valve opened
5/9/2010	11:51:45 AM	Helium MFC set to  500.000000
5/9/2010	11:51:45 AM	H2 MFC set to  0.000000
5/9/2010	11:51:45 AM	BCl3 MFC set to  0.000000
5/9/2010	11:51:45 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:51:45 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:51:45 AM	Tube furnace set to 0
5/9/2010	11:53:06 AM	Helium valve closed
5/9/2010	11:53:06 AM	H2 valve closed
5/9/2010	11:53:06 AM	BCl3 valve closed
5/9/2010	11:53:06 AM	PH3 valve closed
5/9/2010	11:53:06 AM	SiCl4 pre valve closed
5/9/2010	11:53:06 AM	SiCl4 post valve closed
5/9/2010	11:53:06 AM	Main Vac valve closed
5/9/2010	11:53:06 AM	Bypass valve closed
5/9/2010	11:53:06 AM	Bubbler valve closed
5/9/2010	11:53:06 AM	Helium MFC set to  0.000000
5/9/2010	11:53:06 AM	H2 MFC set to  0.000000
5/9/2010	11:53:06 AM	BCl3 MFC set to  0.000000
5/9/2010	11:53:06 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:53:06 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:53:06 AM	Tube furnace set to 0
5/9/2010	11:53:21 AM	Helium valve closed
5/9/2010	11:53:21 AM	H2 valve closed
5/9/2010	11:53:21 AM	BCl3 valve closed
5/9/2010	11:53:21 AM	PH3 valve closed
5/9/2010	11:53:21 AM	SiCl4 pre valve closed
5/9/2010	11:53:21 AM	SiCl4 post valve closed
5/9/2010	11:53:21 AM	Main Vac valve closed
5/9/2010	11:53:21 AM	Bubbler valve closed
5/9/2010	11:53:21 AM	Bypass valve opened
5/9/2010	11:53:21 AM	Helium MFC set to  0.000000
5/9/2010	11:53:21 AM	H2 MFC set to  0.000000
5/9/2010	11:53:21 AM	BCl3 MFC set to  0.000000
5/9/2010	11:53:21 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:53:21 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:53:21 AM	Tube furnace set to 0
5/9/2010	11:53:51 AM	Helium valve closed
5/9/2010	11:53:51 AM	H2 valve closed
5/9/2010	11:53:51 AM	BCl3 valve closed
5/9/2010	11:53:51 AM	PH3 valve closed
5/9/2010	11:53:51 AM	SiCl4 pre valve closed
5/9/2010	11:53:51 AM	SiCl4 post valve closed
5/9/2010	11:53:51 AM	Bubbler valve closed
5/9/2010	11:53:51 AM	Main Vac valve opened
5/9/2010	11:53:51 AM	Bypass valve opened
5/9/2010	11:53:51 AM	Helium MFC set to  0.000000
5/9/2010	11:53:51 AM	H2 MFC set to  0.000000
5/9/2010	11:53:51 AM	BCl3 MFC set to  0.000000
5/9/2010	11:53:51 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:53:51 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:53:51 AM	Tube furnace set to 0
5/9/2010	11:58:51 AM	H2 valve closed
5/9/2010	11:58:51 AM	BCl3 valve closed
5/9/2010	11:58:51 AM	PH3 valve closed
5/9/2010	11:58:51 AM	SiCl4 pre valve closed
5/9/2010	11:58:51 AM	SiCl4 post valve closed
5/9/2010	11:58:51 AM	Main Vac valve closed
5/9/2010	11:58:51 AM	Bypass valve closed
5/9/2010	11:58:51 AM	Bubbler valve closed
5/9/2010	11:58:51 AM	Helium valve opened
5/9/2010	11:58:51 AM	Helium MFC set to  500.000000
5/9/2010	11:58:51 AM	H2 MFC set to  0.000000
5/9/2010	11:58:51 AM	BCl3 MFC set to  0.000000
5/9/2010	11:58:51 AM	SiCl4 MFC set to  0.000000
5/9/2010	11:58:51 AM	Bypass solenoid MFC set to  0.000000
5/9/2010	11:58:51 AM	Tube furnace set to 0
5/9/2010	12:00:12 PM	Helium valve closed
5/9/2010	12:00:12 PM	H2 valve closed
5/9/2010	12:00:12 PM	BCl3 valve closed
5/9/2010	12:00:12 PM	PH3 valve closed
5/9/2010	12:00:12 PM	SiCl4 pre valve closed
5/9/2010	12:00:12 PM	SiCl4 post valve closed
5/9/2010	12:00:12 PM	Main Vac valve closed
5/9/2010	12:00:12 PM	Bypass valve closed
5/9/2010	12:00:12 PM	Bubbler valve closed
5/9/2010	12:00:12 PM	Helium MFC set to  0.000000
5/9/2010	12:00:12 PM	H2 MFC set to  0.000000
5/9/2010	12:00:12 PM	BCl3 MFC set to  0.000000
5/9/2010	12:00:12 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:00:12 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:00:12 PM	Tube furnace set to 0
5/9/2010	12:00:27 PM	Helium valve closed
5/9/2010	12:00:27 PM	H2 valve closed
5/9/2010	12:00:27 PM	BCl3 valve closed
5/9/2010	12:00:27 PM	PH3 valve closed
5/9/2010	12:00:27 PM	SiCl4 pre valve closed
5/9/2010	12:00:27 PM	SiCl4 post valve closed
5/9/2010	12:00:27 PM	Main Vac valve closed
5/9/2010	12:00:27 PM	Bubbler valve closed
5/9/2010	12:00:27 PM	Bypass valve opened
5/9/2010	12:00:27 PM	Helium MFC set to  0.000000
5/9/2010	12:00:27 PM	H2 MFC set to  0.000000
5/9/2010	12:00:27 PM	BCl3 MFC set to  0.000000
5/9/2010	12:00:27 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:00:27 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:00:27 PM	Tube furnace set to 0
5/9/2010	12:00:57 PM	Helium valve closed
5/9/2010	12:00:57 PM	H2 valve closed
5/9/2010	12:00:57 PM	BCl3 valve closed
5/9/2010	12:00:57 PM	PH3 valve closed
5/9/2010	12:00:57 PM	SiCl4 pre valve closed
5/9/2010	12:00:57 PM	SiCl4 post valve closed
5/9/2010	12:00:57 PM	Bubbler valve closed
5/9/2010	12:00:57 PM	Main Vac valve opened
5/9/2010	12:00:57 PM	Bypass valve opened
5/9/2010	12:00:57 PM	Helium MFC set to  0.000000
5/9/2010	12:00:57 PM	H2 MFC set to  0.000000
5/9/2010	12:00:57 PM	BCl3 MFC set to  0.000000
5/9/2010	12:00:57 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:00:57 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:00:57 PM	Tube furnace set to 0
5/9/2010	12:05:57 PM	H2 valve closed
5/9/2010	12:05:57 PM	BCl3 valve closed
5/9/2010	12:05:57 PM	PH3 valve closed
5/9/2010	12:05:57 PM	SiCl4 pre valve closed
5/9/2010	12:05:57 PM	SiCl4 post valve closed
5/9/2010	12:05:57 PM	Main Vac valve closed
5/9/2010	12:05:57 PM	Bypass valve closed
5/9/2010	12:05:57 PM	Bubbler valve closed
5/9/2010	12:05:57 PM	Helium valve opened
5/9/2010	12:05:57 PM	Helium MFC set to  500.000000
5/9/2010	12:05:57 PM	H2 MFC set to  0.000000
5/9/2010	12:05:57 PM	BCl3 MFC set to  0.000000
5/9/2010	12:05:57 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:05:57 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:05:57 PM	Tube furnace set to 0
5/9/2010	12:07:17 PM	Helium valve closed
5/9/2010	12:07:17 PM	H2 valve closed
5/9/2010	12:07:17 PM	BCl3 valve closed
5/9/2010	12:07:17 PM	PH3 valve closed
5/9/2010	12:07:17 PM	SiCl4 pre valve closed
5/9/2010	12:07:17 PM	SiCl4 post valve closed
5/9/2010	12:07:17 PM	Main Vac valve closed
5/9/2010	12:07:17 PM	Bypass valve closed
5/9/2010	12:07:17 PM	Bubbler valve closed
5/9/2010	12:07:17 PM	Helium MFC set to  0.000000
5/9/2010	12:07:17 PM	H2 MFC set to  0.000000
5/9/2010	12:07:17 PM	BCl3 MFC set to  0.000000
5/9/2010	12:07:17 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:07:17 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:07:18 PM	Tube furnace set to 0
5/9/2010	12:07:33 PM	Helium valve closed
5/9/2010	12:07:33 PM	H2 valve closed
5/9/2010	12:07:33 PM	BCl3 valve closed
5/9/2010	12:07:33 PM	PH3 valve closed
5/9/2010	12:07:33 PM	SiCl4 pre valve closed
5/9/2010	12:07:33 PM	SiCl4 post valve closed
5/9/2010	12:07:33 PM	Main Vac valve closed
5/9/2010	12:07:33 PM	Bubbler valve closed
5/9/2010	12:07:33 PM	Bypass valve opened
5/9/2010	12:07:33 PM	Helium MFC set to  0.000000
5/9/2010	12:07:33 PM	H2 MFC set to  0.000000
5/9/2010	12:07:33 PM	BCl3 MFC set to  0.000000
5/9/2010	12:07:33 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:07:33 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:07:33 PM	Tube furnace set to 0
5/9/2010	12:08:03 PM	Helium valve closed
5/9/2010	12:08:03 PM	H2 valve closed
5/9/2010	12:08:03 PM	BCl3 valve closed
5/9/2010	12:08:03 PM	PH3 valve closed
5/9/2010	12:08:03 PM	SiCl4 pre valve closed
5/9/2010	12:08:03 PM	SiCl4 post valve closed
5/9/2010	12:08:03 PM	Bubbler valve closed
5/9/2010	12:08:03 PM	Main Vac valve opened
5/9/2010	12:08:03 PM	Bypass valve opened
5/9/2010	12:08:03 PM	Helium MFC set to  0.000000
5/9/2010	12:08:03 PM	H2 MFC set to  0.000000
5/9/2010	12:08:03 PM	BCl3 MFC set to  0.000000
5/9/2010	12:08:03 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:08:03 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:08:03 PM	Tube furnace set to 0
5/9/2010	12:13:03 PM	Helium valve closed
5/9/2010	12:13:03 PM	H2 valve closed
5/9/2010	12:13:03 PM	BCl3 valve closed
5/9/2010	12:13:03 PM	PH3 valve closed
5/9/2010	12:13:03 PM	SiCl4 pre valve closed
5/9/2010	12:13:03 PM	SiCl4 post valve closed
5/9/2010	12:13:03 PM	Bubbler valve closed
5/9/2010	12:13:03 PM	Main Vac valve opened
5/9/2010	12:13:03 PM	Bypass valve opened
5/9/2010	12:13:03 PM	Helium MFC set to  0.000000
5/9/2010	12:13:03 PM	H2 MFC set to  0.000000
5/9/2010	12:13:03 PM	BCl3 MFC set to  0.000000
5/9/2010	12:13:03 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:13:03 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:13:03 PM	Tube furnace set to 0
5/9/2010	12:13:04 PM	Run finished at 12:13 PM
5/9/2010	12:13:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/9/2010	12:16:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/9/2010	12:16:10 PM	Recipe started at 12:16 PM
5/9/2010	12:16:10 PM	Helium valve closed
5/9/2010	12:16:10 PM	H2 valve closed
5/9/2010	12:16:10 PM	BCl3 valve closed
5/9/2010	12:16:10 PM	PH3 valve closed
5/9/2010	12:16:10 PM	SiCl4 pre valve closed
5/9/2010	12:16:10 PM	SiCl4 post valve closed
5/9/2010	12:16:10 PM	Main Vac valve closed
5/9/2010	12:16:10 PM	Bypass valve closed
5/9/2010	12:16:10 PM	Bubbler valve closed
5/9/2010	12:16:10 PM	Helium MFC set to  0.000000
5/9/2010	12:16:10 PM	H2 MFC set to  0.000000
5/9/2010	12:16:10 PM	BCl3 MFC set to  0.000000
5/9/2010	12:16:10 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:16:10 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:16:11 PM	Tube furnace set to 0
5/9/2010	12:16:11 PM	Run finished at 12:16 PM
5/9/2010	12:16:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/9/2010	12:16:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	12:16:27 PM	Recipe started at 12:16 PM
5/9/2010	12:16:27 PM	Helium valve closed
5/9/2010	12:16:27 PM	H2 valve closed
5/9/2010	12:16:27 PM	BCl3 valve closed
5/9/2010	12:16:27 PM	PH3 valve closed
5/9/2010	12:16:27 PM	SiCl4 pre valve closed
5/9/2010	12:16:27 PM	SiCl4 post valve closed
5/9/2010	12:16:27 PM	Main Vac valve closed
5/9/2010	12:16:27 PM	Bubbler valve closed
5/9/2010	12:16:27 PM	Bypass valve opened
5/9/2010	12:16:27 PM	Helium MFC set to  0.000000
5/9/2010	12:16:27 PM	H2 MFC set to  0.000000
5/9/2010	12:16:27 PM	BCl3 MFC set to  0.000000
5/9/2010	12:16:27 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:16:27 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:16:27 PM	Tube furnace set to 0
5/9/2010	12:16:28 PM	Helium valve closed
5/9/2010	12:16:28 PM	H2 valve closed
5/9/2010	12:16:28 PM	BCl3 valve closed
5/9/2010	12:16:28 PM	PH3 valve closed
5/9/2010	12:16:28 PM	SiCl4 pre valve closed
5/9/2010	12:16:28 PM	SiCl4 post valve closed
5/9/2010	12:16:28 PM	Bubbler valve closed
5/9/2010	12:16:28 PM	Main Vac valve opened
5/9/2010	12:16:28 PM	Bypass valve opened
5/9/2010	12:16:28 PM	Helium MFC set to  0.000000
5/9/2010	12:16:28 PM	H2 MFC set to  0.000000
5/9/2010	12:16:28 PM	BCl3 MFC set to  0.000000
5/9/2010	12:16:28 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:16:28 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:16:28 PM	Tube furnace set to 0
5/9/2010	12:16:28 PM	Run finished at 12:16 PM
5/9/2010	12:16:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	12:17:09 PM	Recipe started at 12:17 PM
5/9/2010	12:17:09 PM	Helium valve closed
5/9/2010	12:17:09 PM	BCl3 valve closed
5/9/2010	12:17:09 PM	PH3 valve closed
5/9/2010	12:17:09 PM	SiCl4 pre valve closed
5/9/2010	12:17:09 PM	SiCl4 post valve closed
5/9/2010	12:17:09 PM	Main Vac valve closed
5/9/2010	12:17:09 PM	Bypass valve closed
5/9/2010	12:17:09 PM	Bubbler valve closed
5/9/2010	12:17:09 PM	H2 valve opened
5/9/2010	12:17:09 PM	Helium MFC set to  0.000000
5/9/2010	12:17:09 PM	H2 MFC set to  500.000000
5/9/2010	12:17:09 PM	BCl3 MFC set to  0.000000
5/9/2010	12:17:09 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:17:09 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:17:09 PM	Tube furnace set to 0
5/9/2010	12:18:29 PM	Helium valve closed
5/9/2010	12:18:29 PM	BCl3 valve closed
5/9/2010	12:18:29 PM	PH3 valve closed
5/9/2010	12:18:29 PM	SiCl4 pre valve closed
5/9/2010	12:18:29 PM	SiCl4 post valve closed
5/9/2010	12:18:29 PM	Main Vac valve closed
5/9/2010	12:18:29 PM	Bypass valve closed
5/9/2010	12:18:29 PM	H2 valve opened
5/9/2010	12:18:29 PM	Bubbler valve opened
5/9/2010	12:18:29 PM	Helium MFC set to  0.000000
5/9/2010	12:18:29 PM	H2 MFC set to  500.000000
5/9/2010	12:18:29 PM	BCl3 MFC set to  0.000000
5/9/2010	12:18:29 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:18:29 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:18:30 PM	Tube furnace set to 1000
5/9/2010	12:38:30 PM	Helium valve closed
5/9/2010	12:38:30 PM	PH3 valve closed
5/9/2010	12:38:30 PM	Main Vac valve closed
5/9/2010	12:38:30 PM	Bypass valve closed
5/9/2010	12:38:30 PM	H2 valve opened
5/9/2010	12:38:30 PM	BCl3 valve opened
5/9/2010	12:38:30 PM	SiCl4 pre valve opened
5/9/2010	12:38:30 PM	SiCl4 post valve opened
5/9/2010	12:38:30 PM	Bubbler valve opened
5/9/2010	12:38:30 PM	Helium MFC set to  0.000000
5/9/2010	12:38:30 PM	H2 MFC set to  500.000000
5/9/2010	12:38:30 PM	BCl3 MFC set to  43.000000
5/9/2010	12:38:30 PM	SiCl4 MFC set to  400.000000
5/9/2010	12:38:30 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:38:30 PM	Tube furnace set to 1000
5/9/2010	12:53:30 PM	H2 valve closed
5/9/2010	12:53:30 PM	BCl3 valve closed
5/9/2010	12:53:30 PM	PH3 valve closed
5/9/2010	12:53:30 PM	SiCl4 pre valve closed
5/9/2010	12:53:30 PM	SiCl4 post valve closed
5/9/2010	12:53:30 PM	Main Vac valve closed
5/9/2010	12:53:30 PM	Bypass valve closed
5/9/2010	12:53:30 PM	Helium valve opened
5/9/2010	12:53:30 PM	Bubbler valve opened
5/9/2010	12:53:30 PM	Helium MFC set to  500.000000
5/9/2010	12:53:30 PM	H2 MFC set to  0.000000
5/9/2010	12:53:30 PM	BCl3 MFC set to  0.000000
5/9/2010	12:53:30 PM	SiCl4 MFC set to  0.000000
5/9/2010	12:53:30 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	12:53:30 PM	Tube furnace set to 0
5/9/2010	1:13:30 PM	Helium valve closed
5/9/2010	1:13:30 PM	H2 valve closed
5/9/2010	1:13:30 PM	BCl3 valve closed
5/9/2010	1:13:30 PM	PH3 valve closed
5/9/2010	1:13:30 PM	SiCl4 pre valve closed
5/9/2010	1:13:30 PM	SiCl4 post valve closed
5/9/2010	1:13:30 PM	Main Vac valve closed
5/9/2010	1:13:30 PM	Bypass valve closed
5/9/2010	1:13:30 PM	Bubbler valve closed
5/9/2010	1:13:30 PM	Helium MFC set to  0.000000
5/9/2010	1:13:30 PM	H2 MFC set to  0.000000
5/9/2010	1:13:30 PM	BCl3 MFC set to  0.000000
5/9/2010	1:13:30 PM	SiCl4 MFC set to  0.000000
5/9/2010	1:13:30 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	1:13:30 PM	Tube furnace set to 0
5/9/2010	1:13:30 PM	Run finished at 1:13 PM
5/9/2010	1:41:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	1:41:27 PM	Recipe started at 1:41 PM
5/9/2010	1:41:27 PM	H2 valve closed
5/9/2010	1:41:27 PM	BCl3 valve closed
5/9/2010	1:41:27 PM	PH3 valve closed
5/9/2010	1:41:27 PM	SiCl4 pre valve closed
5/9/2010	1:41:27 PM	SiCl4 post valve closed
5/9/2010	1:41:27 PM	Main Vac valve closed
5/9/2010	1:41:27 PM	Bypass valve closed
5/9/2010	1:41:27 PM	Bubbler valve closed
5/9/2010	1:41:27 PM	Helium valve opened
5/9/2010	1:41:27 PM	Helium MFC set to  500.000000
5/9/2010	1:41:27 PM	H2 MFC set to  0.000000
5/9/2010	1:41:27 PM	BCl3 MFC set to  0.000000
5/9/2010	1:41:27 PM	SiCl4 MFC set to  0.000000
5/9/2010	1:41:27 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	1:41:27 PM	Tube furnace set to 0
5/9/2010	1:41:33 PM	Helium valve closed
5/9/2010	1:41:33 PM	H2 valve closed
5/9/2010	1:41:33 PM	BCl3 valve closed
5/9/2010	1:41:33 PM	PH3 valve closed
5/9/2010	1:41:33 PM	SiCl4 pre valve closed
5/9/2010	1:41:33 PM	SiCl4 post valve closed
5/9/2010	1:41:33 PM	Main Vac valve closed
5/9/2010	1:41:33 PM	Bypass valve closed
5/9/2010	1:41:33 PM	Bubbler valve closed
5/9/2010	1:41:33 PM	Helium MFC set to  0.000000
5/9/2010	1:41:33 PM	H2 MFC set to  0.000000
5/9/2010	1:41:33 PM	BCl3 MFC set to  0.000000
5/9/2010	1:41:33 PM	SiCl4 MFC set to  0.000000
5/9/2010	1:41:33 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	1:41:33 PM	Tube furnace set to 0
5/9/2010	1:41:33 PM	Run finished at 1:41 PM
5/9/2010	1:41:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	1:51:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	1:51:03 PM	Recipe started at 1:51 PM
5/9/2010	1:51:03 PM	Helium valve closed
5/9/2010	1:51:03 PM	H2 valve closed
5/9/2010	1:51:03 PM	BCl3 valve closed
5/9/2010	1:51:03 PM	PH3 valve closed
5/9/2010	1:51:03 PM	SiCl4 pre valve closed
5/9/2010	1:51:03 PM	SiCl4 post valve closed
5/9/2010	1:51:03 PM	Main Vac valve closed
5/9/2010	1:51:03 PM	Bubbler valve closed
5/9/2010	1:51:03 PM	Bypass valve opened
5/9/2010	1:51:03 PM	Helium MFC set to  0.000000
5/9/2010	1:51:03 PM	H2 MFC set to  0.000000
5/9/2010	1:51:03 PM	BCl3 MFC set to  0.000000
5/9/2010	1:51:03 PM	SiCl4 MFC set to  0.000000
5/9/2010	1:51:03 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	1:51:04 PM	Tube furnace set to 0
5/9/2010	1:51:48 PM	Helium valve closed
5/9/2010	1:51:48 PM	H2 valve closed
5/9/2010	1:51:48 PM	BCl3 valve closed
5/9/2010	1:51:48 PM	PH3 valve closed
5/9/2010	1:51:48 PM	SiCl4 pre valve closed
5/9/2010	1:51:48 PM	SiCl4 post valve closed
5/9/2010	1:51:48 PM	Bubbler valve closed
5/9/2010	1:51:48 PM	Main Vac valve opened
5/9/2010	1:51:48 PM	Bypass valve opened
5/9/2010	1:51:48 PM	Helium MFC set to  0.000000
5/9/2010	1:51:48 PM	H2 MFC set to  0.000000
5/9/2010	1:51:48 PM	BCl3 MFC set to  0.000000
5/9/2010	1:51:48 PM	SiCl4 MFC set to  0.000000
5/9/2010	1:51:48 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	1:51:49 PM	Tube furnace set to 0
5/9/2010	1:51:49 PM	Run finished at 1:51 PM
5/9/2010	1:51:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	1:52:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/9/2010	1:52:15 PM	Recipe started at 1:52 PM
5/9/2010	1:52:15 PM	H2 valve closed
5/9/2010	1:52:15 PM	BCl3 valve closed
5/9/2010	1:52:15 PM	PH3 valve closed
5/9/2010	1:52:15 PM	SiCl4 pre valve closed
5/9/2010	1:52:15 PM	SiCl4 post valve closed
5/9/2010	1:52:15 PM	Main Vac valve closed
5/9/2010	1:52:15 PM	Bypass valve closed
5/9/2010	1:52:15 PM	Bubbler valve closed
5/9/2010	1:52:16 PM	Helium valve opened
5/9/2010	1:52:16 PM	Helium MFC set to  500.000000
5/9/2010	1:52:16 PM	H2 MFC set to  0.000000
5/9/2010	1:52:16 PM	BCl3 MFC set to  0.000000
5/9/2010	1:52:16 PM	SiCl4 MFC set to  0.000000
5/9/2010	1:52:16 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	1:52:16 PM	Tube furnace set to 0
5/9/2010	1:53:37 PM	Helium valve closed
5/9/2010	1:53:37 PM	H2 valve closed
5/9/2010	1:53:37 PM	BCl3 valve closed
5/9/2010	1:53:37 PM	PH3 valve closed
5/9/2010	1:53:37 PM	SiCl4 pre valve closed
5/9/2010	1:53:37 PM	SiCl4 post valve closed
5/9/2010	1:53:37 PM	Main Vac valve closed
5/9/2010	1:53:37 PM	Bypass valve closed
5/9/2010	1:53:37 PM	Bubbler valve closed
5/9/2010	1:53:37 PM	Helium MFC set to  0.000000
5/9/2010	1:53:37 PM	H2 MFC set to  0.000000
5/9/2010	1:53:37 PM	BCl3 MFC set to  0.000000
5/9/2010	1:53:37 PM	SiCl4 MFC set to  0.000000
5/9/2010	1:53:37 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	1:53:37 PM	Tube furnace set to 0
5/9/2010	1:53:52 PM	Helium valve closed
5/9/2010	1:53:52 PM	H2 valve closed
5/9/2010	1:53:52 PM	BCl3 valve closed
5/9/2010	1:53:52 PM	PH3 valve closed
5/9/2010	1:53:52 PM	SiCl4 pre valve closed
5/9/2010	1:53:52 PM	SiCl4 post valve closed
5/9/2010	1:53:52 PM	Main Vac valve closed
5/9/2010	1:53:52 PM	Bubbler valve closed
5/9/2010	1:53:52 PM	Bypass valve opened
5/9/2010	1:53:52 PM	Helium MFC set to  0.000000
5/9/2010	1:53:52 PM	H2 MFC set to  0.000000
5/9/2010	1:53:52 PM	BCl3 MFC set to  0.000000
5/9/2010	1:53:52 PM	SiCl4 MFC set to  0.000000
5/9/2010	1:53:52 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	1:53:52 PM	Tube furnace set to 0
5/9/2010	1:54:23 PM	Helium valve closed
5/9/2010	1:54:23 PM	H2 valve closed
5/9/2010	1:54:23 PM	BCl3 valve closed
5/9/2010	1:54:23 PM	PH3 valve closed
5/9/2010	1:54:23 PM	SiCl4 pre valve closed
5/9/2010	1:54:23 PM	SiCl4 post valve closed
5/9/2010	1:54:23 PM	Bubbler valve closed
5/9/2010	1:54:23 PM	Main Vac valve opened
5/9/2010	1:54:23 PM	Bypass valve opened
5/9/2010	1:54:23 PM	Helium MFC set to  0.000000
5/9/2010	1:54:23 PM	H2 MFC set to  0.000000
5/9/2010	1:54:23 PM	BCl3 MFC set to  0.000000
5/9/2010	1:54:23 PM	SiCl4 MFC set to  0.000000
5/9/2010	1:54:23 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	1:54:23 PM	Tube furnace set to 0
5/9/2010	1:59:23 PM	H2 valve closed
5/9/2010	1:59:23 PM	BCl3 valve closed
5/9/2010	1:59:23 PM	PH3 valve closed
5/9/2010	1:59:23 PM	SiCl4 pre valve closed
5/9/2010	1:59:23 PM	SiCl4 post valve closed
5/9/2010	1:59:23 PM	Main Vac valve closed
5/9/2010	1:59:23 PM	Bypass valve closed
5/9/2010	1:59:23 PM	Bubbler valve closed
5/9/2010	1:59:23 PM	Helium valve opened
5/9/2010	1:59:23 PM	Helium MFC set to  500.000000
5/9/2010	1:59:23 PM	H2 MFC set to  0.000000
5/9/2010	1:59:23 PM	BCl3 MFC set to  0.000000
5/9/2010	1:59:23 PM	SiCl4 MFC set to  0.000000
5/9/2010	1:59:23 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	1:59:23 PM	Tube furnace set to 0
5/9/2010	2:00:43 PM	Helium valve closed
5/9/2010	2:00:43 PM	H2 valve closed
5/9/2010	2:00:43 PM	BCl3 valve closed
5/9/2010	2:00:43 PM	PH3 valve closed
5/9/2010	2:00:43 PM	SiCl4 pre valve closed
5/9/2010	2:00:43 PM	SiCl4 post valve closed
5/9/2010	2:00:43 PM	Main Vac valve closed
5/9/2010	2:00:43 PM	Bypass valve closed
5/9/2010	2:00:43 PM	Bubbler valve closed
5/9/2010	2:00:43 PM	Helium MFC set to  0.000000
5/9/2010	2:00:43 PM	H2 MFC set to  0.000000
5/9/2010	2:00:43 PM	BCl3 MFC set to  0.000000
5/9/2010	2:00:43 PM	SiCl4 MFC set to  0.000000
5/9/2010	2:00:43 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	2:00:43 PM	Tube furnace set to 0
5/9/2010	2:00:58 PM	Helium valve closed
5/9/2010	2:00:58 PM	H2 valve closed
5/9/2010	2:00:58 PM	BCl3 valve closed
5/9/2010	2:00:58 PM	PH3 valve closed
5/9/2010	2:00:58 PM	SiCl4 pre valve closed
5/9/2010	2:00:58 PM	SiCl4 post valve closed
5/9/2010	2:00:58 PM	Main Vac valve closed
5/9/2010	2:00:58 PM	Bubbler valve closed
5/9/2010	2:00:58 PM	Bypass valve opened
5/9/2010	2:00:58 PM	Helium MFC set to  0.000000
5/9/2010	2:00:58 PM	H2 MFC set to  0.000000
5/9/2010	2:00:58 PM	BCl3 MFC set to  0.000000
5/9/2010	2:00:58 PM	SiCl4 MFC set to  0.000000
5/9/2010	2:00:58 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	2:00:59 PM	Tube furnace set to 0
5/9/2010	2:01:29 PM	Helium valve closed
5/9/2010	2:01:29 PM	H2 valve closed
5/9/2010	2:01:29 PM	BCl3 valve closed
5/9/2010	2:01:29 PM	PH3 valve closed
5/9/2010	2:01:29 PM	SiCl4 pre valve closed
5/9/2010	2:01:29 PM	SiCl4 post valve closed
5/9/2010	2:01:29 PM	Bubbler valve closed
5/9/2010	2:01:29 PM	Main Vac valve opened
5/9/2010	2:01:29 PM	Bypass valve opened
5/9/2010	2:01:29 PM	Helium MFC set to  0.000000
5/9/2010	2:01:29 PM	H2 MFC set to  0.000000
5/9/2010	2:01:29 PM	BCl3 MFC set to  0.000000
5/9/2010	2:01:29 PM	SiCl4 MFC set to  0.000000
5/9/2010	2:01:29 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	2:01:29 PM	Tube furnace set to 0
5/9/2010	2:06:29 PM	H2 valve closed
5/9/2010	2:06:29 PM	BCl3 valve closed
5/9/2010	2:06:29 PM	PH3 valve closed
5/9/2010	2:06:29 PM	SiCl4 pre valve closed
5/9/2010	2:06:29 PM	SiCl4 post valve closed
5/9/2010	2:06:29 PM	Main Vac valve closed
5/9/2010	2:06:29 PM	Bypass valve closed
5/9/2010	2:06:29 PM	Bubbler valve closed
5/9/2010	2:06:29 PM	Helium valve opened
5/9/2010	2:06:29 PM	Helium MFC set to  500.000000
5/9/2010	2:06:29 PM	H2 MFC set to  0.000000
5/9/2010	2:06:29 PM	BCl3 MFC set to  0.000000
5/9/2010	2:06:29 PM	SiCl4 MFC set to  0.000000
5/9/2010	2:06:29 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	2:06:29 PM	Tube furnace set to 0
5/9/2010	2:07:49 PM	Helium valve closed
5/9/2010	2:07:49 PM	H2 valve closed
5/9/2010	2:07:49 PM	BCl3 valve closed
5/9/2010	2:07:49 PM	PH3 valve closed
5/9/2010	2:07:49 PM	SiCl4 pre valve closed
5/9/2010	2:07:49 PM	SiCl4 post valve closed
5/9/2010	2:07:49 PM	Main Vac valve closed
5/9/2010	2:07:49 PM	Bypass valve closed
5/9/2010	2:07:49 PM	Bubbler valve closed
5/9/2010	2:07:49 PM	Helium MFC set to  0.000000
5/9/2010	2:07:49 PM	H2 MFC set to  0.000000
5/9/2010	2:07:49 PM	BCl3 MFC set to  0.000000
5/9/2010	2:07:49 PM	SiCl4 MFC set to  0.000000
5/9/2010	2:07:49 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	2:07:49 PM	Tube furnace set to 0
5/9/2010	2:08:04 PM	Helium valve closed
5/9/2010	2:08:04 PM	H2 valve closed
5/9/2010	2:08:04 PM	BCl3 valve closed
5/9/2010	2:08:04 PM	PH3 valve closed
5/9/2010	2:08:04 PM	SiCl4 pre valve closed
5/9/2010	2:08:04 PM	SiCl4 post valve closed
5/9/2010	2:08:04 PM	Main Vac valve closed
5/9/2010	2:08:04 PM	Bubbler valve closed
5/9/2010	2:08:04 PM	Bypass valve opened
5/9/2010	2:08:04 PM	Helium MFC set to  0.000000
5/9/2010	2:08:04 PM	H2 MFC set to  0.000000
5/9/2010	2:08:04 PM	BCl3 MFC set to  0.000000
5/9/2010	2:08:04 PM	SiCl4 MFC set to  0.000000
5/9/2010	2:08:04 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	2:08:05 PM	Tube furnace set to 0
5/9/2010	2:08:35 PM	Helium valve closed
5/9/2010	2:08:35 PM	H2 valve closed
5/9/2010	2:08:35 PM	BCl3 valve closed
5/9/2010	2:08:35 PM	PH3 valve closed
5/9/2010	2:08:35 PM	SiCl4 pre valve closed
5/9/2010	2:08:35 PM	SiCl4 post valve closed
5/9/2010	2:08:35 PM	Bubbler valve closed
5/9/2010	2:08:35 PM	Main Vac valve opened
5/9/2010	2:08:35 PM	Bypass valve opened
5/9/2010	2:08:35 PM	Helium MFC set to  0.000000
5/9/2010	2:08:35 PM	H2 MFC set to  0.000000
5/9/2010	2:08:35 PM	BCl3 MFC set to  0.000000
5/9/2010	2:08:35 PM	SiCl4 MFC set to  0.000000
5/9/2010	2:08:35 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	2:08:35 PM	Tube furnace set to 0
5/9/2010	2:13:35 PM	Helium valve closed
5/9/2010	2:13:35 PM	H2 valve closed
5/9/2010	2:13:35 PM	BCl3 valve closed
5/9/2010	2:13:35 PM	PH3 valve closed
5/9/2010	2:13:35 PM	SiCl4 pre valve closed
5/9/2010	2:13:35 PM	SiCl4 post valve closed
5/9/2010	2:13:35 PM	Bubbler valve closed
5/9/2010	2:13:35 PM	Main Vac valve opened
5/9/2010	2:13:35 PM	Bypass valve opened
5/9/2010	2:13:35 PM	Helium MFC set to  0.000000
5/9/2010	2:13:35 PM	H2 MFC set to  0.000000
5/9/2010	2:13:35 PM	BCl3 MFC set to  0.000000
5/9/2010	2:13:35 PM	SiCl4 MFC set to  0.000000
5/9/2010	2:13:35 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	2:13:35 PM	Tube furnace set to 0
5/9/2010	2:13:36 PM	Run finished at 2:13 PM
5/9/2010	2:13:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/9/2010	2:16:06 PM	Recipe started at 2:16 PM
5/9/2010	2:16:06 PM	Helium valve closed
5/9/2010	2:16:06 PM	BCl3 valve closed
5/9/2010	2:16:06 PM	PH3 valve closed
5/9/2010	2:16:06 PM	SiCl4 pre valve closed
5/9/2010	2:16:06 PM	SiCl4 post valve closed
5/9/2010	2:16:06 PM	Main Vac valve closed
5/9/2010	2:16:06 PM	Bypass valve closed
5/9/2010	2:16:06 PM	Bubbler valve closed
5/9/2010	2:16:06 PM	H2 valve opened
5/9/2010	2:16:06 PM	Helium MFC set to  0.000000
5/9/2010	2:16:06 PM	H2 MFC set to  500.000000
5/9/2010	2:16:06 PM	BCl3 MFC set to  0.000000
5/9/2010	2:16:06 PM	SiCl4 MFC set to  0.000000
5/9/2010	2:16:06 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	2:16:07 PM	Tube furnace set to 0
5/9/2010	2:17:27 PM	Helium valve closed
5/9/2010	2:17:27 PM	BCl3 valve closed
5/9/2010	2:17:27 PM	PH3 valve closed
5/9/2010	2:17:27 PM	SiCl4 pre valve closed
5/9/2010	2:17:27 PM	SiCl4 post valve closed
5/9/2010	2:17:27 PM	Main Vac valve closed
5/9/2010	2:17:27 PM	Bypass valve closed
5/9/2010	2:17:27 PM	H2 valve opened
5/9/2010	2:17:27 PM	Bubbler valve opened
5/9/2010	2:17:27 PM	Helium MFC set to  0.000000
5/9/2010	2:17:27 PM	H2 MFC set to  500.000000
5/9/2010	2:17:27 PM	BCl3 MFC set to  0.000000
5/9/2010	2:17:27 PM	SiCl4 MFC set to  0.000000
5/9/2010	2:17:27 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	2:17:27 PM	Tube furnace set to 1000
5/9/2010	2:37:27 PM	Helium valve closed
5/9/2010	2:37:27 PM	PH3 valve closed
5/9/2010	2:37:27 PM	Main Vac valve closed
5/9/2010	2:37:27 PM	Bypass valve closed
5/9/2010	2:37:27 PM	H2 valve opened
5/9/2010	2:37:27 PM	BCl3 valve opened
5/9/2010	2:37:27 PM	SiCl4 pre valve opened
5/9/2010	2:37:27 PM	SiCl4 post valve opened
5/9/2010	2:37:27 PM	Bubbler valve opened
5/9/2010	2:37:27 PM	Helium MFC set to  0.000000
5/9/2010	2:37:27 PM	H2 MFC set to  400.000000
5/9/2010	2:37:27 PM	BCl3 MFC set to  54.000000
5/9/2010	2:37:27 PM	SiCl4 MFC set to  500.000000
5/9/2010	2:37:27 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	2:37:27 PM	Tube furnace set to 1000
5/9/2010	2:52:27 PM	H2 valve closed
5/9/2010	2:52:27 PM	BCl3 valve closed
5/9/2010	2:52:27 PM	PH3 valve closed
5/9/2010	2:52:27 PM	SiCl4 pre valve closed
5/9/2010	2:52:27 PM	SiCl4 post valve closed
5/9/2010	2:52:27 PM	Main Vac valve closed
5/9/2010	2:52:27 PM	Bypass valve closed
5/9/2010	2:52:27 PM	Helium valve opened
5/9/2010	2:52:27 PM	Bubbler valve opened
5/9/2010	2:52:27 PM	Helium MFC set to  500.000000
5/9/2010	2:52:27 PM	H2 MFC set to  0.000000
5/9/2010	2:52:27 PM	BCl3 MFC set to  0.000000
5/9/2010	2:52:27 PM	SiCl4 MFC set to  0.000000
5/9/2010	2:52:27 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	2:52:27 PM	Tube furnace set to 0
5/9/2010	3:12:27 PM	Helium valve closed
5/9/2010	3:12:27 PM	H2 valve closed
5/9/2010	3:12:27 PM	BCl3 valve closed
5/9/2010	3:12:27 PM	PH3 valve closed
5/9/2010	3:12:27 PM	SiCl4 pre valve closed
5/9/2010	3:12:27 PM	SiCl4 post valve closed
5/9/2010	3:12:27 PM	Main Vac valve closed
5/9/2010	3:12:27 PM	Bypass valve closed
5/9/2010	3:12:27 PM	Bubbler valve closed
5/9/2010	3:12:27 PM	Helium MFC set to  0.000000
5/9/2010	3:12:27 PM	H2 MFC set to  0.000000
5/9/2010	3:12:27 PM	BCl3 MFC set to  0.000000
5/9/2010	3:12:27 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:12:27 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:12:28 PM	Tube furnace set to 0
5/9/2010	3:12:28 PM	Run finished at 3:12 PM
5/9/2010	3:25:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	3:25:28 PM	Recipe started at 3:25 PM
5/9/2010	3:25:28 PM	H2 valve closed
5/9/2010	3:25:28 PM	BCl3 valve closed
5/9/2010	3:25:28 PM	PH3 valve closed
5/9/2010	3:25:28 PM	SiCl4 pre valve closed
5/9/2010	3:25:28 PM	SiCl4 post valve closed
5/9/2010	3:25:28 PM	Main Vac valve closed
5/9/2010	3:25:28 PM	Bypass valve closed
5/9/2010	3:25:28 PM	Bubbler valve closed
5/9/2010	3:25:28 PM	Helium valve opened
5/9/2010	3:25:28 PM	Helium MFC set to  500.000000
5/9/2010	3:25:28 PM	H2 MFC set to  0.000000
5/9/2010	3:25:28 PM	BCl3 MFC set to  0.000000
5/9/2010	3:25:28 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:25:28 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:25:28 PM	Tube furnace set to 0
5/9/2010	3:25:32 PM	Helium valve closed
5/9/2010	3:25:32 PM	H2 valve closed
5/9/2010	3:25:32 PM	BCl3 valve closed
5/9/2010	3:25:32 PM	PH3 valve closed
5/9/2010	3:25:32 PM	SiCl4 pre valve closed
5/9/2010	3:25:32 PM	SiCl4 post valve closed
5/9/2010	3:25:32 PM	Main Vac valve closed
5/9/2010	3:25:32 PM	Bypass valve closed
5/9/2010	3:25:32 PM	Bubbler valve closed
5/9/2010	3:25:32 PM	Helium MFC set to  0.000000
5/9/2010	3:25:32 PM	H2 MFC set to  0.000000
5/9/2010	3:25:32 PM	BCl3 MFC set to  0.000000
5/9/2010	3:25:32 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:25:32 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:25:32 PM	Tube furnace set to 0
5/9/2010	3:25:33 PM	Run finished at 3:25 PM
5/9/2010	3:25:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	3:35:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	3:35:36 PM	Recipe started at 3:35 PM
5/9/2010	3:35:36 PM	Helium valve closed
5/9/2010	3:35:36 PM	H2 valve closed
5/9/2010	3:35:37 PM	BCl3 valve closed
5/9/2010	3:35:37 PM	PH3 valve closed
5/9/2010	3:35:37 PM	SiCl4 pre valve closed
5/9/2010	3:35:37 PM	SiCl4 post valve closed
5/9/2010	3:35:37 PM	Main Vac valve closed
5/9/2010	3:35:37 PM	Bubbler valve closed
5/9/2010	3:35:37 PM	Bypass valve opened
5/9/2010	3:35:37 PM	Helium MFC set to  0.000000
5/9/2010	3:35:37 PM	H2 MFC set to  0.000000
5/9/2010	3:35:37 PM	BCl3 MFC set to  0.000000
5/9/2010	3:35:37 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:35:37 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:35:37 PM	Tube furnace set to 0
5/9/2010	3:37:37 PM	Run aborted at 3:37 PM
5/9/2010	3:37:37 PM	Helium valve closed
5/9/2010	3:37:37 PM	H2 valve closed
5/9/2010	3:37:37 PM	BCl3 valve closed
5/9/2010	3:37:37 PM	PH3 valve closed
5/9/2010	3:37:37 PM	SiCl4 pre valve closed
5/9/2010	3:37:37 PM	SiCl4 post valve closed
5/9/2010	3:37:37 PM	Bypass valve closed
5/9/2010	3:37:37 PM	Main Vac valve closed
5/9/2010	3:37:37 PM	Bubbler valve closed
5/9/2010	3:37:37 PM	Helium MFC set to  0.000000
5/9/2010	3:37:37 PM	H2 MFC set to  0.000000
5/9/2010	3:37:37 PM	BCl3 MFC set to  0.000000
5/9/2010	3:37:37 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:37:37 PM	Tube furnace set to 0
5/9/2010	3:37:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	3:37:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	3:37:44 PM	Recipe started at 3:37 PM
5/9/2010	3:37:44 PM	Helium valve closed
5/9/2010	3:37:44 PM	H2 valve closed
5/9/2010	3:37:44 PM	BCl3 valve closed
5/9/2010	3:37:44 PM	PH3 valve closed
5/9/2010	3:37:44 PM	SiCl4 pre valve closed
5/9/2010	3:37:44 PM	SiCl4 post valve closed
5/9/2010	3:37:44 PM	Main Vac valve closed
5/9/2010	3:37:44 PM	Bubbler valve closed
5/9/2010	3:37:44 PM	Bypass valve opened
5/9/2010	3:37:44 PM	Helium MFC set to  0.000000
5/9/2010	3:37:44 PM	H2 MFC set to  0.000000
5/9/2010	3:37:44 PM	BCl3 MFC set to  0.000000
5/9/2010	3:37:44 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:37:44 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:37:45 PM	Tube furnace set to 0
5/9/2010	3:37:53 PM	Run aborted at 3:37 PM
5/9/2010	3:37:53 PM	Helium valve closed
5/9/2010	3:37:53 PM	H2 valve closed
5/9/2010	3:37:53 PM	BCl3 valve closed
5/9/2010	3:37:53 PM	PH3 valve closed
5/9/2010	3:37:53 PM	SiCl4 pre valve closed
5/9/2010	3:37:53 PM	SiCl4 post valve closed
5/9/2010	3:37:53 PM	Bypass valve closed
5/9/2010	3:37:53 PM	Main Vac valve closed
5/9/2010	3:37:53 PM	Bubbler valve closed
5/9/2010	3:37:53 PM	Helium MFC set to  0.000000
5/9/2010	3:37:53 PM	H2 MFC set to  0.000000
5/9/2010	3:37:53 PM	BCl3 MFC set to  0.000000
5/9/2010	3:37:53 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:37:53 PM	Tube furnace set to 0
5/9/2010	3:37:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	3:38:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	3:38:57 PM	Recipe started at 3:38 PM
5/9/2010	3:38:57 PM	H2 valve closed
5/9/2010	3:38:57 PM	BCl3 valve closed
5/9/2010	3:38:57 PM	PH3 valve closed
5/9/2010	3:38:57 PM	SiCl4 pre valve closed
5/9/2010	3:38:57 PM	SiCl4 post valve closed
5/9/2010	3:38:57 PM	Main Vac valve closed
5/9/2010	3:38:57 PM	Bypass valve closed
5/9/2010	3:38:57 PM	Bubbler valve closed
5/9/2010	3:38:57 PM	Helium valve opened
5/9/2010	3:38:57 PM	Helium MFC set to  500.000000
5/9/2010	3:38:57 PM	H2 MFC set to  0.000000
5/9/2010	3:38:57 PM	BCl3 MFC set to  0.000000
5/9/2010	3:38:57 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:38:57 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:38:57 PM	Tube furnace set to 0
5/9/2010	3:38:58 PM	Helium valve closed
5/9/2010	3:38:58 PM	H2 valve closed
5/9/2010	3:38:58 PM	BCl3 valve closed
5/9/2010	3:38:58 PM	PH3 valve closed
5/9/2010	3:38:58 PM	SiCl4 pre valve closed
5/9/2010	3:38:58 PM	SiCl4 post valve closed
5/9/2010	3:38:58 PM	Main Vac valve closed
5/9/2010	3:38:58 PM	Bypass valve closed
5/9/2010	3:38:58 PM	Bubbler valve closed
5/9/2010	3:38:58 PM	Helium MFC set to  0.000000
5/9/2010	3:38:58 PM	H2 MFC set to  0.000000
5/9/2010	3:38:58 PM	BCl3 MFC set to  0.000000
5/9/2010	3:38:58 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:38:58 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:38:58 PM	Tube furnace set to 0
5/9/2010	3:38:58 PM	Run finished at 3:38 PM
5/9/2010	3:38:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	3:39:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	3:39:02 PM	Recipe started at 3:39 PM
5/9/2010	3:39:02 PM	Helium valve closed
5/9/2010	3:39:02 PM	H2 valve closed
5/9/2010	3:39:02 PM	BCl3 valve closed
5/9/2010	3:39:02 PM	PH3 valve closed
5/9/2010	3:39:02 PM	SiCl4 pre valve closed
5/9/2010	3:39:02 PM	SiCl4 post valve closed
5/9/2010	3:39:02 PM	Main Vac valve closed
5/9/2010	3:39:02 PM	Bubbler valve closed
5/9/2010	3:39:02 PM	Bypass valve opened
5/9/2010	3:39:02 PM	Helium MFC set to  0.000000
5/9/2010	3:39:02 PM	H2 MFC set to  0.000000
5/9/2010	3:39:02 PM	BCl3 MFC set to  0.000000
5/9/2010	3:39:02 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:39:02 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:39:02 PM	Tube furnace set to 0
5/9/2010	3:39:47 PM	Run aborted at 3:39 PM
5/9/2010	3:39:47 PM	Helium valve closed
5/9/2010	3:39:47 PM	H2 valve closed
5/9/2010	3:39:47 PM	BCl3 valve closed
5/9/2010	3:39:47 PM	PH3 valve closed
5/9/2010	3:39:47 PM	SiCl4 pre valve closed
5/9/2010	3:39:47 PM	SiCl4 post valve closed
5/9/2010	3:39:47 PM	Bypass valve closed
5/9/2010	3:39:47 PM	Main Vac valve closed
5/9/2010	3:39:47 PM	Bubbler valve closed
5/9/2010	3:39:47 PM	Helium MFC set to  0.000000
5/9/2010	3:39:47 PM	H2 MFC set to  0.000000
5/9/2010	3:39:47 PM	BCl3 MFC set to  0.000000
5/9/2010	3:39:47 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:39:47 PM	Tube furnace set to 0
5/9/2010	3:39:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	3:42:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	3:42:58 PM	Recipe started at 3:42 PM
5/9/2010	3:42:58 PM	Helium valve closed
5/9/2010	3:42:58 PM	H2 valve closed
5/9/2010	3:42:58 PM	BCl3 valve closed
5/9/2010	3:42:58 PM	PH3 valve closed
5/9/2010	3:42:58 PM	SiCl4 pre valve closed
5/9/2010	3:42:58 PM	SiCl4 post valve closed
5/9/2010	3:42:58 PM	Main Vac valve closed
5/9/2010	3:42:58 PM	Bubbler valve closed
5/9/2010	3:42:58 PM	Bypass valve opened
5/9/2010	3:42:58 PM	Helium MFC set to  0.000000
5/9/2010	3:42:58 PM	H2 MFC set to  0.000000
5/9/2010	3:42:58 PM	BCl3 MFC set to  0.000000
5/9/2010	3:42:58 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:42:58 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:42:58 PM	Tube furnace set to 0
5/9/2010	3:43:51 PM	Helium valve closed
5/9/2010	3:43:51 PM	H2 valve closed
5/9/2010	3:43:51 PM	BCl3 valve closed
5/9/2010	3:43:51 PM	PH3 valve closed
5/9/2010	3:43:51 PM	SiCl4 pre valve closed
5/9/2010	3:43:51 PM	SiCl4 post valve closed
5/9/2010	3:43:51 PM	Bubbler valve closed
5/9/2010	3:43:51 PM	Main Vac valve opened
5/9/2010	3:43:51 PM	Bypass valve opened
5/9/2010	3:43:51 PM	Helium MFC set to  0.000000
5/9/2010	3:43:51 PM	H2 MFC set to  0.000000
5/9/2010	3:43:51 PM	BCl3 MFC set to  0.000000
5/9/2010	3:43:51 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:43:51 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:43:52 PM	Tube furnace set to 0
5/9/2010	3:43:52 PM	Run finished at 3:43 PM
5/9/2010	3:43:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	3:44:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	3:44:12 PM	Recipe started at 3:44 PM
5/9/2010	3:44:12 PM	Helium valve closed
5/9/2010	3:44:12 PM	H2 valve closed
5/9/2010	3:44:12 PM	BCl3 valve closed
5/9/2010	3:44:12 PM	PH3 valve closed
5/9/2010	3:44:12 PM	SiCl4 pre valve closed
5/9/2010	3:44:12 PM	SiCl4 post valve closed
5/9/2010	3:44:12 PM	Main Vac valve closed
5/9/2010	3:44:12 PM	Bubbler valve closed
5/9/2010	3:44:12 PM	Bypass valve opened
5/9/2010	3:44:12 PM	Helium MFC set to  0.000000
5/9/2010	3:44:12 PM	H2 MFC set to  0.000000
5/9/2010	3:44:12 PM	BCl3 MFC set to  0.000000
5/9/2010	3:44:12 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:44:12 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:44:12 PM	Tube furnace set to 0
5/9/2010	3:44:12 PM	Helium valve closed
5/9/2010	3:44:12 PM	H2 valve closed
5/9/2010	3:44:12 PM	BCl3 valve closed
5/9/2010	3:44:12 PM	PH3 valve closed
5/9/2010	3:44:12 PM	SiCl4 pre valve closed
5/9/2010	3:44:12 PM	SiCl4 post valve closed
5/9/2010	3:44:12 PM	Bubbler valve closed
5/9/2010	3:44:12 PM	Main Vac valve opened
5/9/2010	3:44:12 PM	Bypass valve opened
5/9/2010	3:44:12 PM	Helium MFC set to  0.000000
5/9/2010	3:44:12 PM	H2 MFC set to  0.000000
5/9/2010	3:44:12 PM	BCl3 MFC set to  0.000000
5/9/2010	3:44:12 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:44:12 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:44:12 PM	Tube furnace set to 0
5/9/2010	3:44:13 PM	Run finished at 3:44 PM
5/9/2010	3:44:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	3:44:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/9/2010	3:44:21 PM	Recipe started at 3:44 PM
5/9/2010	3:44:21 PM	H2 valve closed
5/9/2010	3:44:21 PM	BCl3 valve closed
5/9/2010	3:44:21 PM	PH3 valve closed
5/9/2010	3:44:21 PM	SiCl4 pre valve closed
5/9/2010	3:44:21 PM	SiCl4 post valve closed
5/9/2010	3:44:21 PM	Main Vac valve closed
5/9/2010	3:44:21 PM	Bypass valve closed
5/9/2010	3:44:21 PM	Bubbler valve closed
5/9/2010	3:44:21 PM	Helium valve opened
5/9/2010	3:44:21 PM	Helium MFC set to  500.000000
5/9/2010	3:44:21 PM	H2 MFC set to  0.000000
5/9/2010	3:44:21 PM	BCl3 MFC set to  0.000000
5/9/2010	3:44:21 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:44:21 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:44:21 PM	Tube furnace set to 0
5/9/2010	3:45:41 PM	Helium valve closed
5/9/2010	3:45:41 PM	H2 valve closed
5/9/2010	3:45:41 PM	BCl3 valve closed
5/9/2010	3:45:41 PM	PH3 valve closed
5/9/2010	3:45:41 PM	SiCl4 pre valve closed
5/9/2010	3:45:41 PM	SiCl4 post valve closed
5/9/2010	3:45:41 PM	Main Vac valve closed
5/9/2010	3:45:41 PM	Bypass valve closed
5/9/2010	3:45:41 PM	Bubbler valve closed
5/9/2010	3:45:41 PM	Helium MFC set to  0.000000
5/9/2010	3:45:41 PM	H2 MFC set to  0.000000
5/9/2010	3:45:41 PM	BCl3 MFC set to  0.000000
5/9/2010	3:45:41 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:45:41 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:45:41 PM	Tube furnace set to 0
5/9/2010	3:45:56 PM	Helium valve closed
5/9/2010	3:45:56 PM	H2 valve closed
5/9/2010	3:45:56 PM	BCl3 valve closed
5/9/2010	3:45:56 PM	PH3 valve closed
5/9/2010	3:45:56 PM	SiCl4 pre valve closed
5/9/2010	3:45:56 PM	SiCl4 post valve closed
5/9/2010	3:45:56 PM	Main Vac valve closed
5/9/2010	3:45:56 PM	Bubbler valve closed
5/9/2010	3:45:56 PM	Bypass valve opened
5/9/2010	3:45:56 PM	Helium MFC set to  0.000000
5/9/2010	3:45:56 PM	H2 MFC set to  0.000000
5/9/2010	3:45:56 PM	BCl3 MFC set to  0.000000
5/9/2010	3:45:56 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:45:56 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:45:56 PM	Tube furnace set to 0
5/9/2010	3:46:28 PM	Helium valve closed
5/9/2010	3:46:28 PM	H2 valve closed
5/9/2010	3:46:28 PM	BCl3 valve closed
5/9/2010	3:46:28 PM	PH3 valve closed
5/9/2010	3:46:28 PM	SiCl4 pre valve closed
5/9/2010	3:46:28 PM	SiCl4 post valve closed
5/9/2010	3:46:28 PM	Bubbler valve closed
5/9/2010	3:46:28 PM	Main Vac valve opened
5/9/2010	3:46:28 PM	Bypass valve opened
5/9/2010	3:46:28 PM	Helium MFC set to  0.000000
5/9/2010	3:46:28 PM	H2 MFC set to  0.000000
5/9/2010	3:46:28 PM	BCl3 MFC set to  0.000000
5/9/2010	3:46:28 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:46:28 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:46:28 PM	Tube furnace set to 0
5/9/2010	3:51:28 PM	H2 valve closed
5/9/2010	3:51:28 PM	BCl3 valve closed
5/9/2010	3:51:28 PM	PH3 valve closed
5/9/2010	3:51:28 PM	SiCl4 pre valve closed
5/9/2010	3:51:28 PM	SiCl4 post valve closed
5/9/2010	3:51:28 PM	Main Vac valve closed
5/9/2010	3:51:28 PM	Bypass valve closed
5/9/2010	3:51:28 PM	Bubbler valve closed
5/9/2010	3:51:28 PM	Helium valve opened
5/9/2010	3:51:28 PM	Helium MFC set to  500.000000
5/9/2010	3:51:28 PM	H2 MFC set to  0.000000
5/9/2010	3:51:28 PM	BCl3 MFC set to  0.000000
5/9/2010	3:51:28 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:51:28 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:51:28 PM	Tube furnace set to 0
5/9/2010	3:52:47 PM	Helium valve closed
5/9/2010	3:52:47 PM	H2 valve closed
5/9/2010	3:52:47 PM	BCl3 valve closed
5/9/2010	3:52:47 PM	PH3 valve closed
5/9/2010	3:52:47 PM	SiCl4 pre valve closed
5/9/2010	3:52:47 PM	SiCl4 post valve closed
5/9/2010	3:52:47 PM	Main Vac valve closed
5/9/2010	3:52:47 PM	Bypass valve closed
5/9/2010	3:52:47 PM	Bubbler valve closed
5/9/2010	3:52:47 PM	Helium MFC set to  0.000000
5/9/2010	3:52:47 PM	H2 MFC set to  0.000000
5/9/2010	3:52:47 PM	BCl3 MFC set to  0.000000
5/9/2010	3:52:47 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:52:47 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:52:47 PM	Tube furnace set to 0
5/9/2010	3:53:02 PM	Helium valve closed
5/9/2010	3:53:02 PM	H2 valve closed
5/9/2010	3:53:02 PM	BCl3 valve closed
5/9/2010	3:53:02 PM	PH3 valve closed
5/9/2010	3:53:02 PM	SiCl4 pre valve closed
5/9/2010	3:53:02 PM	SiCl4 post valve closed
5/9/2010	3:53:02 PM	Main Vac valve closed
5/9/2010	3:53:02 PM	Bubbler valve closed
5/9/2010	3:53:02 PM	Bypass valve opened
5/9/2010	3:53:02 PM	Helium MFC set to  0.000000
5/9/2010	3:53:02 PM	H2 MFC set to  0.000000
5/9/2010	3:53:02 PM	BCl3 MFC set to  0.000000
5/9/2010	3:53:02 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:53:02 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:53:03 PM	Tube furnace set to 0
5/9/2010	3:53:34 PM	Helium valve closed
5/9/2010	3:53:34 PM	H2 valve closed
5/9/2010	3:53:34 PM	BCl3 valve closed
5/9/2010	3:53:34 PM	PH3 valve closed
5/9/2010	3:53:34 PM	SiCl4 pre valve closed
5/9/2010	3:53:34 PM	SiCl4 post valve closed
5/9/2010	3:53:34 PM	Bubbler valve closed
5/9/2010	3:53:34 PM	Main Vac valve opened
5/9/2010	3:53:34 PM	Bypass valve opened
5/9/2010	3:53:34 PM	Helium MFC set to  0.000000
5/9/2010	3:53:34 PM	H2 MFC set to  0.000000
5/9/2010	3:53:34 PM	BCl3 MFC set to  0.000000
5/9/2010	3:53:34 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:53:34 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:53:34 PM	Tube furnace set to 0
5/9/2010	3:58:34 PM	H2 valve closed
5/9/2010	3:58:34 PM	BCl3 valve closed
5/9/2010	3:58:34 PM	PH3 valve closed
5/9/2010	3:58:34 PM	SiCl4 pre valve closed
5/9/2010	3:58:34 PM	SiCl4 post valve closed
5/9/2010	3:58:34 PM	Main Vac valve closed
5/9/2010	3:58:34 PM	Bypass valve closed
5/9/2010	3:58:34 PM	Bubbler valve closed
5/9/2010	3:58:34 PM	Helium valve opened
5/9/2010	3:58:34 PM	Helium MFC set to  500.000000
5/9/2010	3:58:34 PM	H2 MFC set to  0.000000
5/9/2010	3:58:34 PM	BCl3 MFC set to  0.000000
5/9/2010	3:58:34 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:58:34 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:58:34 PM	Tube furnace set to 0
5/9/2010	3:59:53 PM	Helium valve closed
5/9/2010	3:59:53 PM	H2 valve closed
5/9/2010	3:59:53 PM	BCl3 valve closed
5/9/2010	3:59:53 PM	PH3 valve closed
5/9/2010	3:59:53 PM	SiCl4 pre valve closed
5/9/2010	3:59:53 PM	SiCl4 post valve closed
5/9/2010	3:59:53 PM	Main Vac valve closed
5/9/2010	3:59:53 PM	Bypass valve closed
5/9/2010	3:59:53 PM	Bubbler valve closed
5/9/2010	3:59:53 PM	Helium MFC set to  0.000000
5/9/2010	3:59:53 PM	H2 MFC set to  0.000000
5/9/2010	3:59:53 PM	BCl3 MFC set to  0.000000
5/9/2010	3:59:53 PM	SiCl4 MFC set to  0.000000
5/9/2010	3:59:53 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	3:59:53 PM	Tube furnace set to 0
5/9/2010	4:00:08 PM	Helium valve closed
5/9/2010	4:00:08 PM	H2 valve closed
5/9/2010	4:00:08 PM	BCl3 valve closed
5/9/2010	4:00:08 PM	PH3 valve closed
5/9/2010	4:00:08 PM	SiCl4 pre valve closed
5/9/2010	4:00:08 PM	SiCl4 post valve closed
5/9/2010	4:00:08 PM	Main Vac valve closed
5/9/2010	4:00:08 PM	Bubbler valve closed
5/9/2010	4:00:08 PM	Bypass valve opened
5/9/2010	4:00:08 PM	Helium MFC set to  0.000000
5/9/2010	4:00:08 PM	H2 MFC set to  0.000000
5/9/2010	4:00:08 PM	BCl3 MFC set to  0.000000
5/9/2010	4:00:08 PM	SiCl4 MFC set to  0.000000
5/9/2010	4:00:08 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:00:08 PM	Tube furnace set to 0
5/9/2010	4:00:39 PM	Helium valve closed
5/9/2010	4:00:39 PM	H2 valve closed
5/9/2010	4:00:39 PM	BCl3 valve closed
5/9/2010	4:00:39 PM	PH3 valve closed
5/9/2010	4:00:39 PM	SiCl4 pre valve closed
5/9/2010	4:00:39 PM	SiCl4 post valve closed
5/9/2010	4:00:39 PM	Bubbler valve closed
5/9/2010	4:00:39 PM	Main Vac valve opened
5/9/2010	4:00:39 PM	Bypass valve opened
5/9/2010	4:00:39 PM	Helium MFC set to  0.000000
5/9/2010	4:00:39 PM	H2 MFC set to  0.000000
5/9/2010	4:00:39 PM	BCl3 MFC set to  0.000000
5/9/2010	4:00:39 PM	SiCl4 MFC set to  0.000000
5/9/2010	4:00:39 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:00:39 PM	Tube furnace set to 0
5/9/2010	4:05:39 PM	Helium valve closed
5/9/2010	4:05:39 PM	H2 valve closed
5/9/2010	4:05:39 PM	BCl3 valve closed
5/9/2010	4:05:39 PM	PH3 valve closed
5/9/2010	4:05:39 PM	SiCl4 pre valve closed
5/9/2010	4:05:39 PM	SiCl4 post valve closed
5/9/2010	4:05:39 PM	Bubbler valve closed
5/9/2010	4:05:39 PM	Main Vac valve opened
5/9/2010	4:05:39 PM	Bypass valve opened
5/9/2010	4:05:39 PM	Helium MFC set to  0.000000
5/9/2010	4:05:39 PM	H2 MFC set to  0.000000
5/9/2010	4:05:39 PM	BCl3 MFC set to  0.000000
5/9/2010	4:05:39 PM	SiCl4 MFC set to  0.000000
5/9/2010	4:05:39 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:05:39 PM	Tube furnace set to 0
5/9/2010	4:05:40 PM	Run finished at 4:05 PM
5/9/2010	4:05:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/9/2010	4:05:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/9/2010	4:05:53 PM	Recipe started at 4:05 PM
5/9/2010	4:05:53 PM	Helium valve closed
5/9/2010	4:05:53 PM	H2 valve closed
5/9/2010	4:05:53 PM	BCl3 valve closed
5/9/2010	4:05:53 PM	PH3 valve closed
5/9/2010	4:05:53 PM	SiCl4 pre valve closed
5/9/2010	4:05:53 PM	SiCl4 post valve closed
5/9/2010	4:05:53 PM	Main Vac valve closed
5/9/2010	4:05:53 PM	Bypass valve closed
5/9/2010	4:05:53 PM	Bubbler valve closed
5/9/2010	4:05:53 PM	Helium MFC set to  0.000000
5/9/2010	4:05:53 PM	H2 MFC set to  0.000000
5/9/2010	4:05:53 PM	BCl3 MFC set to  0.000000
5/9/2010	4:05:53 PM	SiCl4 MFC set to  0.000000
5/9/2010	4:05:53 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:05:53 PM	Tube furnace set to 0
5/9/2010	4:05:53 PM	Run finished at 4:05 PM
5/9/2010	4:05:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/9/2010	4:06:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	4:06:06 PM	Recipe started at 4:06 PM
5/9/2010	4:06:06 PM	Helium valve closed
5/9/2010	4:06:06 PM	H2 valve closed
5/9/2010	4:06:06 PM	BCl3 valve closed
5/9/2010	4:06:06 PM	PH3 valve closed
5/9/2010	4:06:06 PM	SiCl4 pre valve closed
5/9/2010	4:06:06 PM	SiCl4 post valve closed
5/9/2010	4:06:06 PM	Main Vac valve closed
5/9/2010	4:06:06 PM	Bubbler valve closed
5/9/2010	4:06:06 PM	Bypass valve opened
5/9/2010	4:06:06 PM	Helium MFC set to  0.000000
5/9/2010	4:06:06 PM	H2 MFC set to  0.000000
5/9/2010	4:06:06 PM	BCl3 MFC set to  0.000000
5/9/2010	4:06:06 PM	SiCl4 MFC set to  0.000000
5/9/2010	4:06:06 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:06:06 PM	Tube furnace set to 0
5/9/2010	4:06:06 PM	Helium valve closed
5/9/2010	4:06:06 PM	H2 valve closed
5/9/2010	4:06:06 PM	BCl3 valve closed
5/9/2010	4:06:06 PM	PH3 valve closed
5/9/2010	4:06:06 PM	SiCl4 pre valve closed
5/9/2010	4:06:06 PM	SiCl4 post valve closed
5/9/2010	4:06:06 PM	Bubbler valve closed
5/9/2010	4:06:06 PM	Main Vac valve opened
5/9/2010	4:06:06 PM	Bypass valve opened
5/9/2010	4:06:06 PM	Helium MFC set to  0.000000
5/9/2010	4:06:06 PM	H2 MFC set to  0.000000
5/9/2010	4:06:06 PM	BCl3 MFC set to  0.000000
5/9/2010	4:06:06 PM	SiCl4 MFC set to  0.000000
5/9/2010	4:06:06 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:06:07 PM	Tube furnace set to 0
5/9/2010	4:06:07 PM	Run finished at 4:06 PM
5/9/2010	4:06:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	4:13:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/9/2010	4:13:08 PM	Recipe started at 4:13 PM
5/9/2010	4:13:08 PM	Helium valve closed
5/9/2010	4:13:08 PM	H2 valve closed
5/9/2010	4:13:08 PM	BCl3 valve closed
5/9/2010	4:13:08 PM	PH3 valve closed
5/9/2010	4:13:08 PM	SiCl4 pre valve closed
5/9/2010	4:13:08 PM	SiCl4 post valve closed
5/9/2010	4:13:08 PM	Main Vac valve closed
5/9/2010	4:13:08 PM	Bypass valve closed
5/9/2010	4:13:08 PM	Bubbler valve closed
5/9/2010	4:13:08 PM	Helium MFC set to  0.000000
5/9/2010	4:13:08 PM	H2 MFC set to  0.000000
5/9/2010	4:13:08 PM	BCl3 MFC set to  0.000000
5/9/2010	4:13:08 PM	SiCl4 MFC set to  0.000000
5/9/2010	4:13:08 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:13:08 PM	Tube furnace set to 0
5/9/2010	4:13:09 PM	Run finished at 4:13 PM
5/9/2010	4:13:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/9/2010	4:13:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	4:13:22 PM	Recipe started at 4:13 PM
5/9/2010	4:13:22 PM	Helium valve closed
5/9/2010	4:13:22 PM	H2 valve closed
5/9/2010	4:13:22 PM	BCl3 valve closed
5/9/2010	4:13:22 PM	PH3 valve closed
5/9/2010	4:13:22 PM	SiCl4 pre valve closed
5/9/2010	4:13:22 PM	SiCl4 post valve closed
5/9/2010	4:13:22 PM	Main Vac valve closed
5/9/2010	4:13:22 PM	Bubbler valve closed
5/9/2010	4:13:22 PM	Bypass valve opened
5/9/2010	4:13:22 PM	Helium MFC set to  0.000000
5/9/2010	4:13:22 PM	H2 MFC set to  0.000000
5/9/2010	4:13:22 PM	BCl3 MFC set to  0.000000
5/9/2010	4:13:22 PM	SiCl4 MFC set to  0.000000
5/9/2010	4:13:22 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:13:23 PM	Tube furnace set to 0
5/9/2010	4:13:23 PM	Helium valve closed
5/9/2010	4:13:23 PM	H2 valve closed
5/9/2010	4:13:23 PM	BCl3 valve closed
5/9/2010	4:13:23 PM	PH3 valve closed
5/9/2010	4:13:23 PM	SiCl4 pre valve closed
5/9/2010	4:13:23 PM	SiCl4 post valve closed
5/9/2010	4:13:23 PM	Bubbler valve closed
5/9/2010	4:13:23 PM	Main Vac valve opened
5/9/2010	4:13:23 PM	Bypass valve opened
5/9/2010	4:13:23 PM	Helium MFC set to  0.000000
5/9/2010	4:13:23 PM	H2 MFC set to  0.000000
5/9/2010	4:13:23 PM	BCl3 MFC set to  0.000000
5/9/2010	4:13:23 PM	SiCl4 MFC set to  0.000000
5/9/2010	4:13:23 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:13:23 PM	Tube furnace set to 0
5/9/2010	4:13:23 PM	Run finished at 4:13 PM
5/9/2010	4:13:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	4:14:01 PM	Recipe started at 4:14 PM
5/9/2010	4:14:01 PM	Helium valve closed
5/9/2010	4:14:01 PM	BCl3 valve closed
5/9/2010	4:14:01 PM	PH3 valve closed
5/9/2010	4:14:01 PM	SiCl4 pre valve closed
5/9/2010	4:14:01 PM	SiCl4 post valve closed
5/9/2010	4:14:01 PM	Main Vac valve closed
5/9/2010	4:14:01 PM	Bypass valve closed
5/9/2010	4:14:01 PM	Bubbler valve closed
5/9/2010	4:14:01 PM	H2 valve opened
5/9/2010	4:14:01 PM	Helium MFC set to  0.000000
5/9/2010	4:14:01 PM	H2 MFC set to  500.000000
5/9/2010	4:14:01 PM	BCl3 MFC set to  0.000000
5/9/2010	4:14:01 PM	SiCl4 MFC set to  0.000000
5/9/2010	4:14:01 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:14:02 PM	Tube furnace set to 0
5/9/2010	4:15:21 PM	Helium valve closed
5/9/2010	4:15:21 PM	BCl3 valve closed
5/9/2010	4:15:21 PM	PH3 valve closed
5/9/2010	4:15:21 PM	SiCl4 pre valve closed
5/9/2010	4:15:21 PM	SiCl4 post valve closed
5/9/2010	4:15:21 PM	Main Vac valve closed
5/9/2010	4:15:21 PM	Bypass valve closed
5/9/2010	4:15:21 PM	H2 valve opened
5/9/2010	4:15:21 PM	Bubbler valve opened
5/9/2010	4:15:21 PM	Helium MFC set to  0.000000
5/9/2010	4:15:21 PM	H2 MFC set to  500.000000
5/9/2010	4:15:21 PM	BCl3 MFC set to  0.000000
5/9/2010	4:15:21 PM	SiCl4 MFC set to  0.000000
5/9/2010	4:15:21 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:15:21 PM	Tube furnace set to 1000
5/9/2010	4:35:21 PM	Helium valve closed
5/9/2010	4:35:21 PM	PH3 valve closed
5/9/2010	4:35:21 PM	Main Vac valve closed
5/9/2010	4:35:21 PM	Bypass valve closed
5/9/2010	4:35:21 PM	H2 valve opened
5/9/2010	4:35:21 PM	BCl3 valve opened
5/9/2010	4:35:21 PM	SiCl4 pre valve opened
5/9/2010	4:35:21 PM	SiCl4 post valve opened
5/9/2010	4:35:21 PM	Bubbler valve opened
5/9/2010	4:35:21 PM	Helium MFC set to  0.000000
5/9/2010	4:35:21 PM	H2 MFC set to  500.000000
5/9/2010	4:35:21 PM	BCl3 MFC set to  35.000000
5/9/2010	4:35:21 PM	SiCl4 MFC set to  500.000000
5/9/2010	4:35:21 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:35:21 PM	Tube furnace set to 1000
5/9/2010	4:50:21 PM	H2 valve closed
5/9/2010	4:50:21 PM	BCl3 valve closed
5/9/2010	4:50:21 PM	PH3 valve closed
5/9/2010	4:50:21 PM	SiCl4 pre valve closed
5/9/2010	4:50:21 PM	SiCl4 post valve closed
5/9/2010	4:50:21 PM	Main Vac valve closed
5/9/2010	4:50:21 PM	Bypass valve closed
5/9/2010	4:50:21 PM	Helium valve opened
5/9/2010	4:50:21 PM	Bubbler valve opened
5/9/2010	4:50:21 PM	Helium MFC set to  500.000000
5/9/2010	4:50:21 PM	H2 MFC set to  0.000000
5/9/2010	4:50:21 PM	BCl3 MFC set to  0.000000
5/9/2010	4:50:21 PM	SiCl4 MFC set to  0.000000
5/9/2010	4:50:21 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	4:50:21 PM	Tube furnace set to 0
5/9/2010	5:10:21 PM	Helium valve closed
5/9/2010	5:10:21 PM	H2 valve closed
5/9/2010	5:10:21 PM	BCl3 valve closed
5/9/2010	5:10:21 PM	PH3 valve closed
5/9/2010	5:10:21 PM	SiCl4 pre valve closed
5/9/2010	5:10:21 PM	SiCl4 post valve closed
5/9/2010	5:10:21 PM	Main Vac valve closed
5/9/2010	5:10:21 PM	Bypass valve closed
5/9/2010	5:10:21 PM	Bubbler valve closed
5/9/2010	5:10:21 PM	Helium MFC set to  0.000000
5/9/2010	5:10:21 PM	H2 MFC set to  0.000000
5/9/2010	5:10:21 PM	BCl3 MFC set to  0.000000
5/9/2010	5:10:21 PM	SiCl4 MFC set to  0.000000
5/9/2010	5:10:21 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	5:10:21 PM	Tube furnace set to 0
5/9/2010	5:10:21 PM	Run finished at 5:10 PM
5/9/2010	5:16:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	5:16:36 PM	Recipe started at 5:16 PM
5/9/2010	5:16:36 PM	H2 valve closed
5/9/2010	5:16:36 PM	BCl3 valve closed
5/9/2010	5:16:36 PM	PH3 valve closed
5/9/2010	5:16:36 PM	SiCl4 pre valve closed
5/9/2010	5:16:36 PM	SiCl4 post valve closed
5/9/2010	5:16:36 PM	Main Vac valve closed
5/9/2010	5:16:36 PM	Bypass valve closed
5/9/2010	5:16:36 PM	Bubbler valve closed
5/9/2010	5:16:36 PM	Helium valve opened
5/9/2010	5:16:36 PM	Helium MFC set to  500.000000
5/9/2010	5:16:36 PM	H2 MFC set to  0.000000
5/9/2010	5:16:36 PM	BCl3 MFC set to  0.000000
5/9/2010	5:16:36 PM	SiCl4 MFC set to  0.000000
5/9/2010	5:16:36 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	5:16:36 PM	Tube furnace set to 0
5/9/2010	5:16:37 PM	Helium valve closed
5/9/2010	5:16:37 PM	H2 valve closed
5/9/2010	5:16:37 PM	BCl3 valve closed
5/9/2010	5:16:37 PM	PH3 valve closed
5/9/2010	5:16:37 PM	SiCl4 pre valve closed
5/9/2010	5:16:37 PM	SiCl4 post valve closed
5/9/2010	5:16:37 PM	Main Vac valve closed
5/9/2010	5:16:37 PM	Bypass valve closed
5/9/2010	5:16:37 PM	Bubbler valve closed
5/9/2010	5:16:37 PM	Helium MFC set to  0.000000
5/9/2010	5:16:37 PM	H2 MFC set to  0.000000
5/9/2010	5:16:37 PM	BCl3 MFC set to  0.000000
5/9/2010	5:16:37 PM	SiCl4 MFC set to  0.000000
5/9/2010	5:16:37 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	5:16:38 PM	Tube furnace set to 0
5/9/2010	5:16:38 PM	Run finished at 5:16 PM
5/9/2010	5:16:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2010	5:21:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2010	5:21:14 PM	Recipe started at 5:21 PM
5/9/2010	5:21:14 PM	Helium valve closed
5/9/2010	5:21:14 PM	H2 valve closed
5/9/2010	5:21:14 PM	BCl3 valve closed
5/9/2010	5:21:14 PM	PH3 valve closed
5/9/2010	5:21:14 PM	SiCl4 pre valve closed
5/9/2010	5:21:14 PM	SiCl4 post valve closed
5/9/2010	5:21:14 PM	Main Vac valve closed
5/9/2010	5:21:14 PM	Bubbler valve closed
5/9/2010	5:21:14 PM	Bypass valve opened
5/9/2010	5:21:14 PM	Helium MFC set to  0.000000
5/9/2010	5:21:14 PM	H2 MFC set to  0.000000
5/9/2010	5:21:14 PM	BCl3 MFC set to  0.000000
5/9/2010	5:21:14 PM	SiCl4 MFC set to  0.000000
5/9/2010	5:21:14 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	5:21:14 PM	Tube furnace set to 0
5/9/2010	5:22:00 PM	Helium valve closed
5/9/2010	5:22:00 PM	H2 valve closed
5/9/2010	5:22:00 PM	BCl3 valve closed
5/9/2010	5:22:00 PM	PH3 valve closed
5/9/2010	5:22:00 PM	SiCl4 pre valve closed
5/9/2010	5:22:00 PM	SiCl4 post valve closed
5/9/2010	5:22:00 PM	Bubbler valve closed
5/9/2010	5:22:00 PM	Main Vac valve opened
5/9/2010	5:22:00 PM	Bypass valve opened
5/9/2010	5:22:00 PM	Helium MFC set to  0.000000
5/9/2010	5:22:00 PM	H2 MFC set to  0.000000
5/9/2010	5:22:00 PM	BCl3 MFC set to  0.000000
5/9/2010	5:22:00 PM	SiCl4 MFC set to  0.000000
5/9/2010	5:22:00 PM	Bypass solenoid MFC set to  0.000000
5/9/2010	5:22:00 PM	Tube furnace set to 0
5/9/2010	5:22:00 PM	Run finished at 5:22 PM
5/9/2010	5:22:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
